Indentation mechanics and its application to thin film characterization

Vacuum

Volumn 82, Issue 12, 2008, Pages 1353-1359

  Le Bourhis, E ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

Elastic modulus; Hardness; Nanoindentation; Strain; Stress; Thin Film

Indexed keywords

ELASTICITY; MECHANICS; SPEED; THICK FILMS; THIN FILM DEVICES; THIN FILMS; UNLOADING;

COMPOSITE RESPONSE; ELASTIC MODULUS; HARDNESS; INDENTATION MECHANICS; INSTRUMENTED INDENTATION; INSTRUMENTED NANOINDENTATION; MECHANICAL PERFORMANCES; NANOINDENTATION; STRAIN; STRESS; SURFACE FUNCTIONALITIES; THIN FILM; THIN-FILM CHARACTERIZATION;

STRESSES;

EID: 49149103691     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.03.077     Document Type: Article

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