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Volumn 17, Issue 7-10, 2008, Pages 1137-1142
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Graphitization effects of CH4 addition on NCD growth by first and second Raman spectra and by X-ray diffraction measurements
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Author keywords
Diamond film; Nanocrystalline; Surface characterization; Surface structure
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
DIAMONDS;
GRAPHITE;
LITHOGRAPHY;
NANOCRYSTALLINE SILICON;
NONMETALS;
SILICON;
CHEMICAL VAPOUR DEPOSITION;
DIAMOND FILM;
HOT FILAMENT;
NANOCRYSTALLINE;
NANOCRYSTALLINE DIAMOND FILMS;
SILICON SUBSTRATES;
SURFACE CHARACTERIZATION;
SURFACE STRUCTURE;
DIAMOND FILMS;
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EID: 48849088506
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2008.01.034 Document Type: Article |
Times cited : (26)
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References (31)
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