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Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 601-607

Microstructure and stress in nano-crystalline diamond films deposited by DC glow discharge CVD

(4) Heiman, A a Lakin, E a Zolotoyabko, E a Hoffman, A a

a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY (Israel)

Author keywords

DC plasma CVD; Raman spectroscopy; Stress relaxation; X ray diffraction (XRD)

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; GLOW DISCHARGES; MICROSTRUCTURE; RAMAN SPECTROSCOPY; SILICON; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

CRYSTALLITES;

NANOSTRUCTURED MATERIALS;

DIAMOND COATING; ELECTROCHEMICAL ANALYSIS; MICROSTRUCTURE; PLASMA TREATMENT; STRESS; TRIBOLOGY;

EID: 0036508110 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00631-8 Document Type: Article

Times cited : (46)

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