Growth of faceted, ballas-like and nanocrystalline diamond films deposited in CH4/H2/Ar MPCVD

Diamond and Related Materials

Volumn 10, Issue 12, 2001, Pages 2161-2166

  Yang, Tien Syh ^a   Lai, Jir Yon ^a   Cheng, Chia Liang ^a   Wong, Ming Show ^a  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

Author keywords

Argon plasma; Ballas diamond; Microwave plasma assisted chemical vapor deposition (MPCVD); Nanocrystyalline diamond

Indexed keywords

ARGON; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TEXTURES; X RAY DIFFRACTION ANALYSIS;

FACETED DIAMONDS;

DIAMOND FILMS;

DIAMOND COATING;

EID: 0035577863     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00495-2     Document Type: Article

References (23)