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Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 748-752
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Influence of hydrogen on the residual stress in nanocrystalline diamond films
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Author keywords
Diamond; Grain boundaries; Nanocrystalline; Strain
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Indexed keywords
GRAIN BOUNDARIES;
HYDROGEN;
NANOCRYSTALLINE MATERIALS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SPECTROSCOPY;
RESIDUAL STRESSES;
SCANNING ELECTRON MICROSCOPY;
STRAIN;
TENSILE STRESS;
FILM DEPOSITION;
NANOCRYSTALLINE DIAMOND;
NANOCRYSTALLINE FILMS;
DIAMOND FILMS;
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EID: 34047272335
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2006.11.059 Document Type: Article |
Times cited : (25)
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References (14)
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