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Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 748-752

Influence of hydrogen on the residual stress in nanocrystalline diamond films

Author keywords

Diamond; Grain boundaries; Nanocrystalline; Strain

Indexed keywords

GRAIN BOUNDARIES; HYDROGEN; NANOCRYSTALLINE MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; STRAIN; TENSILE STRESS;

EID: 34047272335     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.11.059     Document Type: Article
Times cited : (25)

References (14)
  • 2
    • 34047245494 scopus 로고    scopus 로고
    • CYRANNUS® I: European Patent No. 0 872 164, USA Patent No. 6,198,224.
  • 7
    • 34047258364 scopus 로고    scopus 로고
    • N. Woehrl, V. Buck; Verhandl. DPG (VI) 41, DS 7.7 (2006).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.