Application of deuterium exchange to analyze moisture uptake characteristics of porous low-dielectric-constant SiOCH films

Electrochemical and Solid-State Letters

Volumn 11, Issue 9, 2008, Pages

  Vinogradova, Ekaterina ^a   Smith, Casey E ^a   Mueller, Dennis W ^a   Reidy, Richard F ^a  

^a UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CHEMICAL VAPOR DEPOSITION; DEPOSITS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; INFRARED SPECTROSCOPY; MATERIALS PROPERTIES; MOISTURE; PLASMA APPLICATIONS; SPECTROSCOPIC ANALYSIS; SURFACE TOPOGRAPHY; SURFACE TREATMENT;

BROAD BANDS; CHEMICAL MARKERS; CHEMICAL VAPORS; DEUTERIUM EXCHANGE; ELECTROCHEMICAL SOCIETY (ECS); FOURIER TRANSFORM INFRARED (FT-IR); LOW-K MATERIALS; MOISTURE UPTAKE; MONITOR (CO); PLASMA TREATMENTS; SPECTRAL DISTRIBUTIONS; SPIN ON;

DEUTERIUM;

EID: 48249146162     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2947786     Document Type: Article

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