Effect of probe tip size on atomic force microscopy roughness values for very smooth samples

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 1185-1190

  Gondran, Carolyn F H ^a   Michelson, Diane K ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY IMAGES; GEOMETRIC MODELS; POWER SPECTRA; SURFACE FEATURES;

ATOMIC FORCE MICROSCOPY; MATHEMATICAL MODELS; METALLIC FILMS; MICROSTRUCTURE; SEMICONDUCTOR MATERIALS; SURFACE ROUGHNESS;

SURFACE PHENOMENA;

EID: 33745508391     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2172936     Document Type: Article

References (5)

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3. C. F. H. Gondran, K. L. Westra, and D. J. Thomson, J. Vac. Sci. Technol. B 13, 344 (1995).
4. C. F. H. Gondran, D. K. Michelson, Proceedings of the 30th International Symposium for Testing and Failure Analysis., ASM, International Materials Park, Ohio, 2004, p. 357.
5. J. F. Song and T. V. Vorburger, Appl. Opt. 30, 42 (1991).