High-fidelity replication of Dammann gratings using soft lithography

Applied Optics

Volumn 47, Issue 10, 2008, Pages 1427-1429

  Wang, Wei ^a   Zhou, Changhe ^a   Jia, Wei ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; DIFFRACTION GRATINGS;

DAMMANN GRATINGS; DIFFRACTION IMAGES; ELASTOMERIC STAMPS; GRATING STRUCTURES; LIGHT INTENSITY; OPTICAL PERFORMANCE; SOFT LITHOGRAPHY; UV CURABLE POLYMER;

LITHOGRAPHY;

EID: 48249145677     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.001427     Document Type: Article

References (21)

1. J. Jahns, M. M. Downs, M. E. Prise, N. Streibl, and S. J. Walker, "Dammann gratings for laser beam shaping," Opt. Eng. 28, 1267-1275 (1989).
2. C. Zhou and L. Liu, "Numerical study of Dammann array illuminators," Appl. Opt. 34, 5961-5969 (1995).
3. G. Li, C. Zhou, and E. Dai, "Splitting of femtosecond laser pulses by using a Dammann grating and compensation gratings," J. Opt. Soc. Am. A 22, 767-772 (2005).
4. C. Di and C. Zhou, "Dynamic optical coupled system employing even-numbered Dammann gratings," Appl. Opt. 45, 1993-2000 (2006).
5. C. Zhou, J. Jia, and L. Liu, "Circular Dammann grating," Opt. Lett. 28, 2174-2176 (2003).
6. S. Zhao and P. S. Chung, "Design of a circular Dammann grating," Opt. Lett. 31, 2387-2389 (2006).
7. M. T. Gale, "Replication techniques for diffractive optical elements," Microelectron. Eng. 34, 321-339 (1997).
8. M. T. Gale, "Replicated technology for micro-optics and optical microsystems," Proc. SPIE 5177, 113-120 (2003).
9. M. T. Gale, C. Gimkiewicz, S. Obi, M. Schnieper, J. Söchtig, H. Thiele, and S. Westenhöfer, "Replication technology of optical microsystems," Opt. Lasers Eng. 43, 373-386 (2005).
10. Y. Xia and G. M. Whitesides, "Soft lithography," Angew. Chem. Int. Ed. 37, 550-575 (1998).
11. Y. Xia, E. Kim, X.-M. Zhao, J. A. Rogers, M. Prentiss, and G. M. Whitesides, "Complex optical surfaces formed by replica molding against elastomeric masters," Science. 273, 347-349 (1996).
12. S. R. Quake and A. Scherer, "From micro- to nanofabrication with soft materials," Science. 290, 1536-1540 (2000).
13. M. Geissler and Y. Xia, "Patterning: principles and some new developments," Adv. Mater. 16, 1249-1269 (2004).
14. A. Kocabas and A. Aydinli, "Polymeric waveguide Bragg grating filter using soft lithography," Opt. Express 14, 10228-10232 (2006).
15. Y. Huang, G. T. Paloczi, J. Scheuer, and A. Yariv, "Soft lithography replication of polymeric microring optical resonators," Opt. Express 11, 2452-2458 (2003).
16. M. V. Kunnavakkam, F. M. Houlihan, M. Schlax, J. A. Liddle, P. Kolodner, O. Nalamasu, and J. A. Rogers, "Low-cost, low-loss microlens arrays fabricated by soft-lithography replication process," Appl. Phys. Lett. 82, 1152-1154 (2003).
17. W.-C. Chuang, C.-T. Ho, and W.-C. Chang, "Fabrication of polymer waveguides by a replication method," App. Opt. 45, 8304-8307 (2006).
18. Y. S. Kim, K. Y. Suh, and H. H. Lee, "Fabrication of three-dimensional microstructure by soft molding," Appl. Phys. Lett. 79, 2285-2287 (2001).
19. http://www.norlandprod.com/adhesives/NOA%2061.html
20. J. A. Rogers, K. E. Paul, and G. M. Whitesides, "Quantifying distortions in soft lithography," J. Vac. Sci. Technol. B 16, 88-97 (1998).
21. W.-C. Chuang, C.-T. Ho, and W.-C. Wang, "Fabrication of a high-resolution periodical structure using a replication process," Opt. Express 13, 6685-6692 (2005).