Fabrication of polymer waveguides by a replication method

Applied Optics

Volumn 45, Issue 32, 2006, Pages 8304-8307

  Chuang, Wei Ching ^a   Ho, Chi Ting ^a   Chang, Wen Chung ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT PROPAGATION; LITHOGRAPHY; MEASUREMENT THEORY; OPTICAL FIBER FABRICATION; POLYMERS; SILICONES; ULTRAVIOLET RADIATION;

POLYDIMETHYLSILOXANE (PDMS) MOLDS; POLYMER WAVEGUIDES; REPLICATION METHOD; SOFT-LITHOGRAPHY METHOD;

WAVEGUIDES;

EID: 33845960510     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.008304     Document Type: Article

References (31)

1. B. Howley, Y. Chen, X. Wang, Q. Zhou, Z. Shi, Y. Jiang, and R. T. Chen, "2-bit reconfigurable true time delay lines using 2 × 2 polymer waveguide switches," IEEE Photon. Technol. Lett. 17, 1944-1946 (2005).
2. G. Fischbeck, R. Moosburger, C. Kostrzewa, A. Achen, and K. Petermann, "Singlemode optical waveguides using a high temperature stable polymer with low losses in the 1.55 μm range," Electron. Lett. 33, 518-519 (1997).
3. J.-W. Kang, J.-P. Kim, W.-Y. Lee, J.-S. Lee, and J.-J. Kim, "Low loss fluorinated poly(arylene ether sulfide) waveguides with high thermal stability," J. Lightware Technol. 19, 872-875 (2001).
4. J. W. Kang, J. S. Kim, and J.-J. Kim, "Optimized oxygen plasma ething of polycarbonate for low-loss optical waveguide fabrication," Jpn. J. Appl. Phys. 40, 3215-3219 (2001).
5. R. Yoshimura, M. Hikita, S. Tomaru, and S. Imamura, "Low-loss polymeric optical waveguides fabricated with deuterated polyfluoromethacrylate, " J. Lightware Technol. 16, 1030-1037 (1998).
6. J. W. Kang, J. S. Kim, C. M. Lee, E. Kim, and J. J. Kim, "1 × 2 all optical switch using photochromic-doped waveguide," Electron. Lett. 36, 1641-1642 (2000).
7. K. S. Han, D. B. Kim, W. H. Jang, and T. H. Rhee, "Chlorofluorinated polyimides for low loss optical waveguides application," Jpn. J. Appl. Phys. 38, L1249-L1251 (1999).
8. K. Kobayashi, T. Matsuura, Y. Hida, S. Sasaki, and T. Maruno, "Fluorinated polyimide waveguides with low polarization-dependent loss and their applications to thermooptic switches," J. Lightware Technol. 16, 1024-1037 (1998).
9. J. W. Kang, J.-J. Kim, J. Kim, X. Li, and M.-H. Lee, "Low-loss and thermally stable TE-mode selective polymer waveguide using photosensitive fluorinated polyimide," IEEE Photon. Technol. Lett. 14, 1297-1299 (2002).
10. M. B. J. Diemeer, F. M. M. Suyten, E. S. Trommel, A. McDonald, J. M. Copeland, L. W. Jenneskens, and W. H. G. Horsthuis, "Photoinduced channel waveguide formation in nonlinear optical polymers," Electron. Lett. 26, 379-380 (1990).
11. Y. Shi, W. H. Steir, L. Yu, M, Chen, and L. R. Dalton, "Large stable photoinduced refractive index change in a nonlinear optical polyester polymer with disperse red side groups," Appl. Phys. Lett. 58, 1131-1133 (1991).
12. T. E. Van Eck, A. J. Ticknor, R. S. Lytel, and G. F. Lipscomb, "Complementary optical tap fabricated in an electro-optic polymer waveguide," Appl. Phys. Lett. 58, 1588-1590 (1991).
13. O. Watanabe and M. Tsuchimori, "Improvement in linear and nonlinear optical-properties by blending poly(N-vinyl-2-pyrrolidone) with an electro-optic polymer," Polymer 42, 6447-6451 (2001).
14. M. Hikita, Y. Shuto, M. Amano, R. Yoshimura, S. Tomaru, and H. Kozawaguchi, "Optical intensity modulation in a vertically stacked coupler incorporating electro-optic polymer," Appl. Phys. Lett. 63, 1161-1163 (1993).
15. W. Wang, D. Chen, and H. R. Fetterman, "Travelling wave electro-optic phase modulator using cross-linked nonlinear optical polymer," Appl. Phys. Lett. 85, 929-931 (1994).
16. B. L. Booth, "Low loss channel waveguides in polymers," J. Lightware Technol. 7, 1445-1453 (1989).
17. L. Eldada and L. W. Shacklette, "Advances in polymer integrated optics," IEEE J. Sel. Top. Quantum Electron 6, 54-68 (2000).
18. Y. Y. Maruo, S. Sasaki, and T. Tamamura, "Embedded channel polyimide waveguide fabrication by direct electron beam writing method," J. Lightware Technol. 13, 1718-1723 (1995).
19. H. Becker and W. Dietz, "Microfluidic devices for (μ-TAS applications fabricated by polymer hot embossing," in Microfluid Devices and Systems, A. B. Frazier and C. H. Ahn, eds., Proc. SPIE 3515, 177-181 (1998).
20. P. M. Ferm and L. W. Shackjette, "High volume manufacturing of polymer waveguides via UV-embossing," in Linear, Nonlinear, and Power-Limiting Organics, E. Manfred, M. G. Kuzyk, C. M. Larson, and R. A. Norwood, eds., Proc. SPIE 4106, 1-10 (2000).
21. K. E. Paul, T. L. Breen, J. Aizenberg, and G. M. Whitesides, "Maskless photolithography: embossed photoresist as its own optical element," Appl. Phys. Lett. 73, 2893-2895 (1998).
22. X.-M. Zhao, S. P. Smith, S. J. Waldman, G. M. Whitesides, and M. Plenties, "Demonstration of waveguide couplers fabricated using microtransfer molding," Appl. Phys. Lett. 71, 1017-1019 (1997).
23. M. Gad-el-Hak, The MEMS Handbook (CRC Press, 2002).
24. H. D. Bauer, W. Ehrfeld, M. Harder, T. Paatzsch, M. Popp, and F. Smaglinski, "Polymer waveguide devices with passive pigtailing: an application of LIGA technology," Synth. Met. 115, 13-20 (2000).
25. J. C. Letters, W. Olthuis, P. H. Veltink, and P. Bergveld, "The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications," J. Micromech. Microeng. 7, 145-147 (1997).
26. P. Nussbaum, I. Philipoussis, A. Huser, and H. P. Herzig, "Simple technique for replication of micro-optical elements," Opt. Eng. 37, 1804-1808 (1998).
27. M. Rossi, H. Rudmann, B. Marty, and A. Maciossek, "Wafer-scale micro-optics replication technology," in Lithographic and Micromaching Techniques for Optical Component Fabrication II, E.-B. Kley and H. P. Herzid, eds., Proc. SPIE 5183, 148-154 (2003).
28. G. Keiser, Optical Fiber Communications, 3rd ed. (McGrawHill, 2000).
29. Y. L. Hsueh, M. C. Yang, and H. C. Chang, "Three-dimensional noniterative full-vectorial beam propagation method based on the alternating direction implicit method," J. Lightwave Technol. 17, 2389-2397 (1999).
30. R. G. Hunsperger, Integrated Optics: Theory and Technology (Springer-Verlag, 1985).
31. H. Nishihara, M. Haruna, and T. Suhara, Optical Integrated Circuits (McGraw-Hill, 2001).