Fabrication of a high-resolution periodical structure using a replication process

Optics Express

Volumn 13, Issue 18, 2005, Pages 6685-6692

  Chuang, Wei Ching ^a   Ho, Chi Ting ^a   Wang, Wei Chih ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b UNIVERSITY OF WASHINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR ANALYSIS; HOLOGRAPHY; INTERFEROMETRY; LASERS; PHOTORESISTS; POLYMERS; ULTRAVIOLET RADIATION;

CURE EPOXY; GRATING PATTERNS; MICRO-MOLDING PROCESSES; PERIODIC STRUCTURES;

OPTICS;

EID: 24944585210     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.006685     Document Type: Article

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