Replication technology for micro-optics and optical microsystems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5177, Issue , 2003, Pages 113-120

  Gale, Michael T ^a  

^a CSEM   (Switzerland)

Author keywords

Diffractive optics; Micro optics; Optical microsystems; Replication

Indexed keywords

CURING; DIFFRACTIVE OPTICS; INJECTION MOLDING; LIGHT REFRACTION; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; OPTICAL DESIGN; OPTICAL FILTERS; OPTICAL SYSTEMS; SOL-GELS; ULTRAVIOLET RADIATION; WSI CIRCUITS;

HOT EMBOSSING; OPTICAL MICROSYSTEMS; REPLICATION TECHNOLOGY; UV CURING; UV EMBOSSING;

MICROOPTICS;

EID: 2342511018     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.507666     Document Type: Conference Paper

References (7)

1. M.T. Gale, Ch. 6 "Replication" in Micro-Optics : Elements, systems and applications, H.P. Herzig, Ed., Taylor and Francis, London, 1997.
2. M.T. Gale, "Diffractive optics and micro-optics production technology in Europe", in OSA Trends in Optics and Photonics (TOPS), Vol. 75, Diffractive Optics and Micro-Optics, OSA Technical Digest, Postconference Edition (Optical Society of America, Washington DC, 2002), pp 18-20.
3. M.C. Hutley, Ch. 5 "Refractive Lenslet Arrays" in Micro-Optics : Elements, systems and applications, H.P. Herzig, Ed., Taylor and Francis, London, 1997.
4. M Rossi and I Kallioniemi, "Micro-Optical modules fabricated by high-precision replication processes", in OSA Trends in Optics and Photonics (TOPS), Vol. 75, Diffractive Optics and Micro-Optics, OSA Technical Digest, Postconference Edition (Optical Society of America, Washington DC, 2002), pp 108-110.
5. Brite-Euram Project BE97-4641 DONDODEM. ORMOCER® is a registered trademark of the Fraunhofer-Gesellschaft.
6. MT Gale, S Obi and N de Rooij, "Replicated Optical MEMS in sol-gel materials", Proc. IEEE/LEOS Optical MEMS 2003, Hawaii, August, 2003.
7. M Rossi, Th Ammer, M.T. Gale, A. Maciossek, J. Söchtig and C. Ferrari, "Diffractive Optical Elements for Passive Infrared Detectors", in OSA Trends in Diffractive Optics and Micro-Optics, OSA Technical Digest, (Optical Society of America, Washington DC, 2000), pp 288-290.