Acoustical parameters characterisation of aluminium nitride thin film BAW resonators using resonant spectrum approach

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1437-1440

  Cornez, D ^a   Lapp, S ^a   Cochran, S ^a   Kirk, K J ^a  

^a UNIVERSITY OF THE WEST OF SCOTLAND   (United Kingdom)

Author keywords

BAW; One dimensional model; SPRF; Thin film

Indexed keywords

ALUMINUM; ALUMINUM CLADDING; ALUMINUM COMPOUNDS; LIGHT METALS; NATURAL FREQUENCIES; NITRIDES; THICK FILMS; THIN FILM DEVICES; THIN FILMS; ULTRASONICS;

ACOUSTICAL PARAMETERS; ALUMINIUM NITRIDE; BAW; BAW RESONATORS; CHARACTERISATION; COMPOSITE RESONATORS; EXPERIMENTAL MEASUREMENTS; FILM PARAMETERS; INSERTION LOSSES; ONE-DIMENSIONAL MODEL; PIEZOELECTRIC PROPERTIES; RESONANT FREQUENCIES; RESONANT SPECTRUM; SPRF; THIN FILM;

RESONATORS;

EID: 48149100066     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.361     Document Type: Conference Paper

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