Thin film bulk acoustic wave devices for applications at 5.2 GHz

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 174-177

  Fattinger, G G ^a   Kaitila, J ^a   Aigner, R ^a   Nessler, W ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM NITRIDE; BANDWIDTH; COUPLED CIRCUITS; GLOBAL SYSTEM FOR MOBILE COMMUNICATIONS; PIEZOELECTRIC DEVICES; RESONATORS; STANDING WAVE METERS; THIN FILMS;

FILM BULK ACOUSTIC WAVE DEVICES; INTERDIGITAL TRANSDUCERS (IDT); SOLIDLY MOUNTED RESONATORS (SMR); VOLTAGE STANDING WAVE RATIO (VSWR);

ACOUSTIC BULK WAVE DEVICES;

EID: 4143081648     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. K. M. Lakin, G. R. Kline, K. T. McCarron, "High-Q Microwave Acoustic Resonators and Filters", IEEE Transactions on Microwave Theory and Techniques, Vol.41, No. 12, Dec. 1993
2. T. Nishihara, T. Yokoyama, T. Miyashita, and Y. Satoh, "High Performance and Miniature Thin Film Bulk Acoustic Wave Filters for 5 GHz", Proceedings of UFFC2002, Munich Oct. 8-11
3. R. Ruby, P. Bradley, J. Larson, Y. Oshmyansyk, D. Figueredo, "Ultra-Miniature High-Q Filters and Duplexers using FBAR Technology", IEEE ISSCC2001 conference, Feb. 2001
4. R. Aigner, J. Kaitila, J. Ellä, L. Elbrecht, W. Nessler, M. Handtmann, T. Herzog, and S. Marksteiner, "Bulk-Acoustic-Wave Filters: Performance Optimization and Volume Manufacturing", Proceedings of IMS2003, Philadelphia June 8-13, 2003
5. J. D. Larson III, P. D. Bradley, S. Wartenberg and R. Ruby, 2000 IEEE Ultrasonics Symposium Proceedings