Analysis and experiment of HBAR frequency spectra and applications to characterize the piezoelectric thin film and to HBAR design

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2002, Pages 27-35

  Pao, Shih Yung ^a   Chao, Min Chiang ^a   Wang, Zuoqing ^a   Chiu, Chih Hung ^a   Lan, Kung Chih ^a   Huang, Zi Neng ^a   Shih, Lung Rung ^a   Wang, Chi Lin ^a  

^a TXC CORPORATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MATERIALS; ELASTIC MODULI; ELECTRODES; ELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS; SPECTRUM ANALYSIS; THIN FILMS;

COMPOSITE RESONATORS;

PIEZOELECTRIC DEVICES;

EID: 0036442467     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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