Fast evaluation of piezoelectric aluminum nitride films by infrared optical techniques

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2006, Pages 2297-2300

  Clement, M ^a   Iborra, E ^a   Olivares, J ^a   Gonzalez Castilla S ^a   Sanz Hervas A ^a   Vergara, L ^a   Sangrador, J ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

AlN; FTIR; Morphology; Piezoresponse

Indexed keywords

ALN; ALN FILMS; ALUMINUM NITRIDE FILMS; CRYSTAL QUALITIES; ELECTRO-ACOUSTIC DEVICES; FOURIER TRANSFORM INFRARED SPECTROPHOTOMETRY; FTIR; IR SPECTRUM; LONGITUDINAL OPTICAL; MORPHOLOGICAL PROPERTIES; OPTICAL TECHNIQUE; PIEZOELECTRIC RESPONSE; PIEZORESPONSE; TRANSVERSE OPTICAL MODES;

ALUMINUM; ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; FOURIER TRANSFORMS; MORPHOLOGY; NITRIDES; PIEZOELECTRICITY; QUALITY CONTROL; X RAY DIFFRACTION;

OPTICAL FILMS;

EID: 48149107847     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2006.578     Document Type: Conference Paper

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