Aluminum nitride thin films for high frequency applications

Ferroelectrics

Volumn 224, Issue 1-4, 1999, Pages 243-250

  Dubois, Marc Alexandre ^a   Muralt, Paul ^a   Sagalowicz, Laurent ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ALUMINUM COMPOUNDS; COMPRESSIVE STRESS; ELECTRODES; PIEZOELECTRIC MATERIALS; RESONANCE; SPUTTERING; TENSILE STRESS;

ALUMINUM NITRIDE; BULK ACOUSTIC RESONATORS;

THIN FILMS;

EID: 0033086844     PISSN: 00150193     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/00150199908210573     Document Type: Article

References (3)

1. P. Muralt, Integrated Ferroelectrics, 17 , 297-307 (1997).
2. A. L. Kholkin, C. Wüthrich, D. V. Taylor and N. Setter, Rev. Sci. Instrum., 67 (5), 1935-1941 (1996).
3. K. M. Lakin, K. T. McCarron and R. E. Rose, in proc. IEEE Ultrasonics Symposium, 1995.