Fabrication, modeling and testing of a thin film Au/Ti microheater

International Journal of Thermal Sciences

Volumn 46, Issue 6, 2007, Pages 580-588

  Zhang, K L ^a   Chou, S K ^a   Ang, S S ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b University of Arkansas   (United States)

Author keywords

Au Ti; Experiment; Microheater; Modeling; Thin film

Indexed keywords

FINITE ELEMENT METHOD; GOLD; IGNITION; MATHEMATICAL MODELS; MICROSENSORS; TITANIUM;

CONVENTIONAL HEATER; MICROHEATERS; THERMAL MODELING;

THIN FILMS;

EID: 33947517616     PISSN: 12900729     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijthermalsci.2006.08.002     Document Type: Article

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