Parylene micro membrane capacitive sensor array for chemical and biological sensing

Sensors and Actuators, B: Chemical

Volumn 115, Issue 1, 2006, Pages 494-502

  Satyanarayana, Srinath ^a   McCormick, Daniel T ^b   Majumdar, Arun ^a,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Capacitive; Micro membrane; Microfluidics; Parylene; Polymer; Surface stress sensor

Indexed keywords

ALCOHOLS; BIOSENSORS; DIAGNOSIS; DRUG THERAPY; GENETIC ENGINEERING; STIFFNESS; TOLUENE;

CAPACITIVE; MICRO MEMBRANE; MICROFLUIDICS; PARYLENE; SURFACE STRESS SENSOR;

CHEMICAL SENSORS;

EID: 33645748178     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.10.013     Document Type: Article

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