Imido Complexes Derived from the Reactions of Niobium and Tantalum Pentachlorides with Primary Amines: Relevance to the Chemical Vapor Deposition of Metal Nitride Films

Inorganic Chemistry

Volumn 35, Issue 17, 1996, Pages 4910-4920

  Jayaratne, Kumudini C ^a   Yap, Glenn P A ^b   Haggerty, Brian S ^b   Rheingold, Arnold L ^b   Winter, Charles H ^a  

^a WAYNE STATE UNIVERSITY   (United States)

^b UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001292972     PISSN: 00201669     EISSN: None     Source Type: Journal    
DOI: 10.1021/ic960178f     Document Type: Article

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