Fabrication of epitaxial NbN devices with TiN resistors

IEEE Transactions on Applied Superconductivity

Volumn 15, Issue 2 PART I, 2005, Pages 984-987

  Kawakami, Akira ^a   Terajima, Ryo ^b   Imai, Syozo ^b   Wang, Zhen ^a  

^a NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY   (Japan)

^b JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Epitaxial; Niobium nitride; Resistor; Titanium nitride; Titanium oxide

Indexed keywords

CRYSTAL STRUCTURE; EPITAXIAL GROWTH; LATTICE CONSTANTS; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); RESISTORS; SUPERCONDUCTING DEVICES; SUPERCONDUCTIVITY; THIN FILMS; TITANIUM NITRIDE; TITANIUM OXIDES; X RAY ANALYSIS;

EPITAXIAL; JOSEPHSON ARRAY OSCILLATORS; MICROSTRIP RESONATORS; NIOBIUM NITRIDE;

NIOBIUM COMPOUNDS;

EID: 22144453866     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2005.850161     Document Type: Conference Paper

References (12)

1. A. Kawakami and Z. Wang,"650-GHz and 1-THz Josephson array oscillators using shunted tunnel junctions with a small parasitic inductance," IEICE Trans. Electron., vol. E81-C, pp. 1595-1600, Oct. 1998.
2. A. Kawakami, Y. Uzawa, and Z. Wang, "Properties of Josephson array oscillators at submillimeter wave region," IEEE Trans. Appl. Supercond., vol. 9, pp. 4554-4558, Jun. 1999.
3. M. Bin, M. C. Gaidis, J. Zmuidzinas, T. G. Phillips, and H. G. LeDuc, "Quasioptical SIS mixers with normal tuning structures," IEEE Trans. Appl. Supercond., vol. 7, pp. 3584-3588, Jun. 1997.
4. 2/A1 tuning circuits for low-noise 1 THz SIS mixers," IEEE Trans. Appl. Supercond., vol. 11, pp. 653-656, Mar. 2001.
5. J. Kawamura, J. Chen, D. Miller, J. Kooi, J. Zmuidzinas, B. Bumble, H. G. LeDuc, and J. A. Stern, "Low-noise submillimeter-wave NbTiN superconducting tunnel junction mixers," Appl. Phys. Lett., vol. 75, pp. 4013-4015, Dec. 1999.
6. A. Kawakami, Z. Wang, and S. Miki, "Low-loss epitaxial NbN/MgO/NbN trilayers for THz applications," IEEE Trans. Appl. Supercond., vol. 11, pp. 80-83, Mar. 2001.
7. A. Kawakami, S. Miki, Y. Uzawa, and Z. Wang, "Estimation of surface resistance for epitaxial NbN films in the frequency range of 0.1-1.1 THz," IEEE Trans. Appl. Supercond., vol. 13, pp. 1147-1150, Jun. 2003.
8. A. Kawakami and Z. Wang, "Fabrication and characterization of epitaxial NbN/MgO/NbN Josephson tunnel junctions," J. Appl. Phys., vol. 90, no. 9, pp. 4796-4799, Nov. 2001.
9. D. R. Lide, CRC Handbook of Chemistry and Physics, 72nd ed. Boca Raton, FL: CRC Press, 1991-1992.
10. A. Kawakami, Y. Uzawa, and Z. Wang, "Development of epitaxial NbN/MgO/NbN-superconductor-insulator-superconductor mixers for operations over the Nb gap frequency," Appl. Phys. Lett., vol. 83, no. 19, pp. 3954-3956, Nov. 2003.
11. A. Kawakami, S. Miki, and Z. Wang, "Fabrication of epitaxial NbN/MgO/NbN tunnel junctions using an ion-beam sputtered tunnel barrier," Physica C, vol. 392-396, pp. 1387-1391, 2003.
12. A. Kawakami, Y. Uzawa, and Z. Wang, "Frequency dependence of penetration depth for epitaxial NbN thin films at 0.1-1.1 THz," Physica C, vol. 412-414, pp. 1455-1458, 2004.