Quantitative measurement of piezoelectric coefficient of thin film using a scanning evanescent microwave microscope

Review of Scientific Instruments

Volumn 79, Issue 6, 2008, Pages

  Zhao, Zhenli ^a   Luo, Zhenlin ^a   Liu, Chihui ^a   Wu, Wenbin ^a   Gao, Chen ^a   Lu, Yalin ^b  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b UNITED STATES AIR FORCE ACADEMY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROWAVES; PIEZOELECTRIC TRANSDUCERS; SCANNING; SOLIDS; THICK FILMS; THIN FILM DEVICES; THIN FILMS; VAPOR DEPOSITION;

(PL) PROPERTIES; AMERICAN INSTITUTE OF PHYSICS (AIP); EVANESCENT MICROWAVE (EM); MICROSCOPIC LEVELS; NEW APPROACHES; PIEZO-ELECTRIC EFFECTS; PIEZOELECTRIC COEFFICIENTS; PZT THIN FILMS; QUANTITATIVE MEASUREMENTS; SCANNING AREA; SCANNING SPEED; SUBMICRON SPATIAL RESOLUTION; TEST MEASUREMENTS; TO MANY;

PIEZOELECTRICITY;

EID: 46449129785     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2940275     Document Type: Article

References (15)

1. P. Muralt, J. Micromech. Microeng. 10, 136 (2000).
2. F. Xu, F. Chu, and S. Trolier-Mc Kinstry, J. Appl. Phys. 86, 588 (1999).
3. K. Lefki and G. J. M. Dormans, J. Appl. Phys. 76, 1764 (1994).
4. A. L. Kholkin, Ch. Wutchrich, D. V. Taylor, and N. Setter, Rev. Sci. Instrum. 67, 1935 (1996).
5. J. A. Christman, R. R. Woolcott, Jr., A. I. Kingon, and R. J. Nemanich, Appl. Phys. Lett. 73, 3851 (1998).
6. C. Gao, T. Wei, F. Duewer, Y. Lu, and X.-D. Xiang, Appl. Phys. Lett. 71, 1872 (1997).
7. C. Gao and X.-D. Xiang, Rev. Sci. Instrum. 69, 3846 (1998).
8. Y. Lu, T. Wei, F. Duewer, Y. Lu, N. Ming, P. G. Schultz, and X.-D. Xiang, Science 276, 2004 (1997).
9. C. Gao, F. Duewer, Y. Lu, and X.-D. Xiang, Appl. Phys. Lett. 73, 1146 (1998).
10. C. Gao, F. Duewer, and X.-D. Xiang, Appl. Phys. Lett. 75, 3005 (1999).
11. F. Duewer, C. Gao, I. Takeuchi, and X.-D. Xiang, Appl. Phys. Lett. 74, 2696 (1999).
12. F. Duewer, C. Gao, and X.-D. Xiang, Rev. Sci. Instrum. 71, 2414 (2000).
13. J. Lu and J. R. Chu, J. Chin. Univ. Sci. Technol. 32, 748 (2002).
14. J. Lu, " Thick PZT film preparation by electrostatic spray deposition for application in MEMS.," Ph.D. thesis, University of Science and technolony of China, 2004.
15. J. F. Li, D. D. Viehland, T. Tani, C. D. E. Lakeman, and D. A. Payne, J. Appl. Phys. 75, 442 (1994).