Topography induced by sputtering in a magnetic sector instrument: An AFM and SEM study

Applied Surface Science

Volumn 238, Issue 1-4 SPEC. ISS., 2004, Pages 24-28

  Iacob, E ^a   Bersani, M ^a   Lui, A ^a   Giubertoni, D ^a   Barozzi, M ^a   Anderle, M ^a  

^a ITC IRST   (Italy)

Author keywords

AFM; Morphological characterization; Ripples; SIMS; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BEAMS; MAGNETIC DEVICES; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

MAGNETIC SECTOR INSTRUMENT; MORPHOLOGICAL CHARACTERIZATION; RIPPLES; TOPOGRAPHY;

SURFACE TOPOGRAPHY;

EID: 4644240691     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.05.184     Document Type: Conference Paper

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