Nanofabrication challenges for NEMS

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 607-610

  Cui, Zheng ^a   Gu, Changzhi ^b  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

^b INSTITUTE OF PHYSICS   (China)

Author keywords

MEMS; Microfabrication; Nanofabrication; NEMS

Indexed keywords

MOLECULES; NANOSTRUCTURES; SELF ASSEMBLY;

INTERNATIONAL CONFERENCES; MOLECULAR SYSTEMS; NANO FABRICATION; SELF-ASSEMBLY METHODS;

NEMS;

EID: 46149117033     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334855     Document Type: Conference Paper

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