High aspect ratio Pt field emitters fabricated by electron beam assisted deposition

Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005

Volumn 2005, Issue , 2005, Pages 229-230

  Jin, A Z ^a   Wang, Z L ^a   Li, H J ^a   Luo, Q ^a   Yang, H F ^a   Cui, Z ^b   Gu, C Z ^a  

^a INSTITUTE OF PHYSICS   (China)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33947198177     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IVNC.2005.1619569     Document Type: Conference Paper

References (4)

1. F. Floreani, H.W. Koops, W. Elsäßer, "Operation of high power field emitters fabricated with electron beam deposition and concept of a miniaturised free electron laser", Microelectronic Engineering 57-58 (2001) 1009-1016.
2. C. Ochiai, O. Yavas, M. Takai, A. Hosono, S. Okuda, "Fabrication process of field emitter arrays using focused ion and electron beam induced reaction", J. Vac. Sci. Technol. B 19 (2001) 933-935.
3. J.W. Gadzuk and E.W. Plummer, "Field Emission Energy Distribution (FEED)", Rev. Mod. Phys. 45 (1973) 487-548.
4. L. Nilsson, O. Groening, P. Groening, O. Kuettel, and L. Schlapbach, "Characterization of thin film electron emitters by scanning anode field emission microscopy", J. Appl. Phys. 90(2001) 768-780.