Tens femtogram resoluble piezoresistive cantilever sensors with optimized high-mode resonance excitation

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 832-836

  Jin, Dazhong ^a   Liu, Jian ^a   Li, Xinxin ^a   Liu, Min ^a   Zuo, Guomin ^a   Wang, Yuelin ^a   Yu, Haitao ^a   Ge, Xiaohong ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Biosensors; Microelectromechanical devices; Piezoresistors; Resonance

Indexed keywords

CANTILEVER BEAMS; CHEMICAL SENSORS; MOLECULES; NEMS; OPTIMIZATION; RESONANCE; SENSORS;

ELECTROMAGNETIC EXCITATIONS; EXPERIMENTAL RESULTS; FEMTOGRAM; INTERNATIONAL CONFERENCES; MOLECULAR DETECTION; MOLECULAR SYSTEMS; OPTIMIZED EXCITATION; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTIVE; QUALITY FACTOR (Q FACTOR); RESONANCE EXCITATIONS; RESONANT CANTILEVERS; RESONANT SENSORS; SENSING RESOLUTION; SENSITIVE MASS; SENSOR PERFORMANCES;

DETECTORS;

EID: 46149111920     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334906     Document Type: Conference Paper

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