-
2
-
-
0030362039
-
-
A. Maier-Schneider, S. Korprululu, E. Ballhausen Holm, and J. Obermeier, Micromech. Microeng. 6, 436 (1996).
-
(1996)
Micromech. Microeng.
, vol.6
, pp. 436
-
-
Maier-Schneider, A.1
Korprululu, S.2
Ballhausen Holm, E.3
Obermeier, J.4
-
3
-
-
0032394142
-
-
P. Yashar, S. A. Barnett, J. Rechner, and W. D. Sproul, J. Vac. Sci. Technol. A 16, 2913 (1998).
-
(1998)
J. Vac. Sci. Technol. A
, vol.16
, pp. 2913
-
-
Yashar, P.1
Barnett, S.A.2
Rechner, J.3
Sproul, W.D.4
-
7
-
-
0027270622
-
-
J. A. Ruud, D. Josell, F. Spaepen, and A. L. Green, J. Mater. Res. 8, 112 (1993).
-
(1993)
J. Mater. Res.
, vol.8
, pp. 112
-
-
Ruud, J.A.1
Josell, D.2
Spaepen, F.3
Green, A.L.4
-
14
-
-
0347853958
-
-
O. Tabata, K. Kawahate, S. Sugiyama, and I. Igarashi, Sens. Actuators 20, 134 (1989).
-
(1989)
Sens. Actuators
, vol.20
, pp. 134
-
-
Tabata, O.1
Kawahate, K.2
Sugiyama, S.3
Igarashi, I.4
-
15
-
-
0345063563
-
-
E. I. Bromley, J. N. Randall, D. C. Flanders, and R. W. Mountain, J. Vac. Sci. Technol. B 1, 1364 (1983).
-
(1983)
J. Vac. Sci. Technol. B
, vol.1
, pp. 1364
-
-
Bromley, E.I.1
Randall, J.N.2
Flanders, D.C.3
Mountain, R.W.4
-
16
-
-
0027883819
-
-
M. K. Small, J. J. Vlassak, S. F. Powel, B. J. Daniels, and W. D. Nix, Mater. Res. Soc. Symp. Proc. 308, 159 (1993).
-
(1993)
Mater. Res. Soc. Symp. Proc.
, vol.308
, pp. 159
-
-
Small, M.K.1
Vlassak, J.J.2
Powel, S.F.3
Daniels, B.J.4
Nix, W.D.5
-
18
-
-
5544274244
-
-
M. G. Allen, M. Mehregany, R. T. Howe, and S. D. Senturia, Appl. Phys. Lett. 51, 241 (1987).
-
(1987)
Appl. Phys. Lett.
, vol.51
, pp. 241
-
-
Allen, M.G.1
Mehregany, M.2
Howe, R.T.3
Senturia, S.D.4
-
20
-
-
0031245815
-
-
A. Karimi, O. R. Shojaei, T. Kruml, and J. L. Martin, Thin Solid Films 308-309, 334 (1997).
-
(1997)
Thin Solid Films
, vol.308-309
, pp. 334
-
-
Karimi, A.1
Shojaei, O.R.2
Kruml, T.3
Martin, J.L.4
-
22
-
-
0000857259
-
-
R. A. Stewart, J. Kim, E. S. Kim, R. M. White, and R. S. Muller, Sens. Actuators 2, 285 (1991).
-
(1991)
Sens. Actuators
, vol.2
, pp. 285
-
-
Stewart, R.A.1
Kim, J.2
Kim, E.S.3
White, R.M.4
Muller, R.S.5
-
23
-
-
0028708833
-
-
J. A. Liddle, H. A. Huggins, P. Mulgrew, L. R. Harriott, H. H. Wade, and K. Bolan, Mater. Res. Soc. Symp. Proc. 338, 501 (1994).
-
(1994)
Mater. Res. Soc. Symp. Proc.
, vol.338
, pp. 501
-
-
Liddle, J.A.1
Huggins, H.A.2
Mulgrew, P.3
Harriott, L.R.4
Wade, H.H.5
Bolan, K.6
-
24
-
-
0001336982
-
-
P. O. Renault, K. F. Badawi, L. Bimbault, P. Goudeau, E. Elkaim, and J. P. Lauriat, Appl. Phys. Lett. 73, 1952 (1998).
-
(1998)
Appl. Phys. Lett.
, vol.73
, pp. 1952
-
-
Renault, P.O.1
Badawi, K.F.2
Bimbault, L.3
Goudeau, P.4
Elkaim, E.5
Lauriat, J.P.6
-
26
-
-
0032476316
-
-
E. Harry, A. Rouzaud, M. Ignat, and P. Juliet, Thin Solid Films 332, 195 (1998).
-
(1998)
Thin Solid Films
, vol.332
, pp. 195
-
-
Harry, E.1
Rouzaud, A.2
Ignat, M.3
Juliet, P.4
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