Latest amorphous silicon microbolometer developments at LETI-LIR

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6940, Issue , 2008, Pages

  Yon, Jean Jacques ^a   Mottin, Eric ^a   Tissot, Jean Luc ^b  

^a CEA LETI   (France)

^b ULIS   (France)

Author keywords

Amorphous silicon; IRFPA; Microbolometer; Uncooled IR detector

Indexed keywords

(100) SILICON; (OTDR) TECHNOLOGY; (P ,P ,T) MEASUREMENTS; (PL) PROPERTIES; COMMERCIALISATION; HIGH PERFORMANCE; INFRARED TECHNOLOGIES; LARGE SCALE PRODUCTIONS; MICRO(UNCOOLED) BOLOMETER; PERFORMANCE ENHANCEMENTS; UNCOOLED;

EID: 45549109991     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.780538     Document Type: Conference Paper

References (16)

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