New IRCMOS architecture applied to uncooled microbolometers developed at LETI

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6542, Issue , 2007, Pages

  Simoens, F ^a   Tchagaspanian, M ^a   Arnaud, A ^a   Imperinetti, P ^a   Chamming'S, G ^a   Yon, J J ^a   Tissot, J L ^b  

^a CEA LETI   (France)

^b ULIS   (France)

Author keywords

IRCMOS; Microbolometers; TECless; Uncooled thermal imaging

Indexed keywords

BOLOMETERS; CMOS INTEGRATED CIRCUITS; FOCAL PLANE ARRAYS; INFRARED DETECTORS; TEMPERATURE SENSORS;

MICROBOLOMETER DETECTORS; MICROBOLOMETERS; TEMPERATURE SENSITIVITY; UNCOOLED THERMAL IMAGING;

INFRARED IMAGING;

EID: 35648972138     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.719310     Document Type: Conference Paper

References (3)

1. J.J. Yon, E. Mottin, L. Biancardini, L. Letellier, J.L. Tissot, "Infrared microbolometer sensors and their application in automotive safety", AMAA 2003 Yearbook, pp.137-157, S. Krueger, W. Gessner editors, Springer-Verlag, ISBN 3-540-00597-8
2. J.J. Yon, A. Astier, S. Bisotto, G. Chamming's, A. Durand, J. L. Martin, E. Mottin, J.L. Ouvrier-Buffet, J. L. Tissot, "First demonstration of 25μm pitch uncooled amorphous silicon microbolometer IRFPA at LETI-LIR", Proceeding of SPIE Orlando 2005, 2005.
3. J.L. Tissot, C. Trouilleau, B. Fièque, A. Crastes & O. Legras, "Uncooled microbolometer detector: recent developments at ULIS", Opto-Electronics Review 14(1), pp 25-32, 2006