Uncooled amorphous silicon 160 × 120 IRFPA with 25 μm pixel-pitch for large volume applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6542, Issue , 2007, Pages

  Trouilleau, C ^a   Fieque, B ^a   Tissot, J L ^a   Robert, P ^a   Crastes, A ^a   Minassian, C ^a   Legras, O ^a   Dupont, B ^b   Touvignon, A ^a   Tinnes, S ^a   Yon, J J ^c   Arnaud, A ^c  

^a ULIS   (France)

^b UNIVERSITÉ PARIS SACLAY   (France)

^c CEA GRENOBLE   (France)

Author keywords

Amorphous silicon; IRFPA; Micro bolometer; Uncooled IR detector

Indexed keywords

AMORPHOUS SILICON; BOLOMETERS; INFRARED DETECTORS; INTEGRATED CIRCUITS; PIXELS; THERMAL INSULATION;

MICRO BOLOMETERS; READOUT INTEGRATED CIRCUIT (ROIC) ARCHITECTURE; UNCOOLED IR DETECTORS;

FOCAL PLANE ARRAYS;

EID: 35649023290     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.723599     Document Type: Conference Paper

References (3)

1. "35 μm pitch at ULIS, a breakthrough", C. Trouilleau, A. Crastes, O. Legras, J.L. Tissot, J.P. Chatard, Infrared Technology and Applications XXXI, Proc. of SPIE Vol. 5783, (2005), pp 578-585
2. "320×240 microbolometer uncooled IRFPA development", J.L. Tissot et al, Infrared technology and Applications XXVI, proc. of SPIE Vol. 4130, (2000), pp. 473-479
3. "Microbolometer development and production at Indigo Systems", W. Terre et al, Infrared Technology and Applications XXIV, proc. of SPIE Vol. 5074 (2003), pp. 518-526