메뉴 건너뛰기




Volumn 6940, Issue , 2008, Pages

Innovative on-chip packaging applied to uncooled IRFPA

Author keywords

Microbolometer; Vacuum packaging

Indexed keywords

BOLOMETERS; CHIP SCALE PACKAGES; COMPUTER NETWORKS; DETECTORS; ELECTRONIC EQUIPMENT MANUFACTURE; INFRARED RADIATION; IRIDIUM; METEOROLOGICAL INSTRUMENTS; PACKAGING; PIGMENTS; STANDARDS; STRUCTURE (COMPOSITION); TECHNOLOGY; VACUUM APPLICATIONS; WINDOWS;

EID: 45549101974     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.780433     Document Type: Conference Paper
Times cited : (13)

References (6)
  • 1
    • 45549103050 scopus 로고    scopus 로고
    • Procédés et dispositifs de fabrication de détecteurs de rayonnement
    • FR 2 822 541 French Patent, 2001
    • M. Vilain, Procédés et dispositifs de fabrication de détecteurs de rayonnement, FR 2 822 541 French Patent, 2001.
    • Vilain, M.1
  • 2
    • 20044369212 scopus 로고    scopus 로고
    • A. Astier, A. Arnaud, J. Ouvrier-Buffet, J. Yon, Advanced Packaging Development for Very Low Cost Uncooled IRFPA, Infrared Components and Their Applications, 8-11 November 2004, Beijing, China, Proceedings of SPIE, 5640, pp 107-116.
    • A. Astier, A. Arnaud, J. Ouvrier-Buffet, J. Yon, Advanced Packaging Development for Very Low Cost Uncooled IRFPA, Infrared Components and Their Applications, 8-11 November 2004, Beijing, China, Proceedings of SPIE, Vol. 5640, pp 107-116.
  • 5
    • 0028529149 scopus 로고
    • Electrostatically driven vacuum encapsulatedpolysillicon resonators: Part I. Design and fabrication
    • R. Legtenberg and H.A.C. Tilmans, Electrostatically driven vacuum encapsulatedpolysillicon resonators: Part I. Design and fabrication, Sensors and Actuators A, 45 (1994), 57-66.
    • (1994) Sensors and Actuators A , vol.45 , pp. 57-66
    • Legtenberg, R.1    Tilmans, H.A.C.2
  • 6
    • 0001370233 scopus 로고
    • Recherches sur la propagation des ondes électromagnétiques sinusoïdales dans les milieux stratifiés - Applications aux couches minces
    • F. Abelès, Recherches sur la propagation des ondes électromagnétiques sinusoïdales dans les milieux stratifiés - Applications aux couches minces, Ann. De Physique, 5 (1950), 596-640.
    • (1950) Ann. De Physique , vol.5 , pp. 596-640
    • Abelès, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.