Macromodel for micromechanical, multi-electrode structures in force feedback control systems

International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Volumn , Issue , 1999, Pages 183-186

  Handtmann, M ^a   Aigner, R ^a   Ploetz, F ^a   Wachutka, G ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; EIGENVALUES AND EIGENFUNCTIONS; FEEDBACK CONTROL; FINITE ELEMENT METHOD; FORCE CONTROL; MATHEMATICAL MODELS; MICROACTUATORS; MICROSENSORS;

MICROMECHANICAL MULTIELECTRODE STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033285114     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)