Developments in the understanding of ALD processes and applications of ALD in critical technologies: Part 1: Near IR diode laser spectroscopy as a probe of ALD chemistry Part 2: The synthesis of novel semiconductor-based photonic crystals

ECS Transactions

Volumn 11, Issue 7, 2007, Pages 155-166

  Pemble, Martyn E ^a   Povey, Ian M ^a   Chalvet, Francis ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ATOMS; LASER SPECTROSCOPY; PHOTONIC CRYSTALS; SEMICONDUCTOR DIODES; SEMICONDUCTOR LASERS; VANADIUM DIOXIDE;

COLLOIDAL PHOTONIC CRYSTALS; CRITICAL TECHNOLOGIES; IN-SITU STUDY; NEAR IR DIODES; NEW APPROACHES; PHOTONIC BANDGAP MATERIALS; REACTIVE GAS; THERMO-CHROMIC;

ATOMIC LAYER DEPOSITION;

EID: 45249085527     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2779080     Document Type: Conference Paper

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