Time-resolved in-situ spectroscopic monitoring of the CVD of tin oxide onto a glass substrate

Chemical Vapor Deposition

Volumn 7, Issue 1, 2001, Pages 39-43

  Holdsworth, Robert J ^a   Martin, Philip A ^a   Raisbeck, Deborah ^b   Rivero, Juan ^b   Sanders, Helen E ^b   Sheel, David ^b   Pemble, Martyn E ^c  

^a UNIVERSITY OF HUDDERSFIELD   (United Kingdom)

^b Pilkington Group Limited   (United Kingdom)

^c UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Glass substrates; In situ monitoring; IR spectroscopy; Tin oxide films

Indexed keywords

EID: 0002501654     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(200101)7:1<39::AID-CVDE39>3.0.CO;2-Z     Document Type: Article

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