SCOPUS 정보 검색 플랫폼

Journal of Materials Science

Volumn 39, Issue 18, 2004, Pages 5817-5823

Calculation of residual thermal stress in GaN epitaxial layers grown on technologically important substrates

(2) Barghout, K a Chaudhuri, J b

a WICHITA STATE UNIVERSITY (United States)

b Wichita State University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUFFER LAYERS; COEFFICIENT OF THERMAL EXPANSION (CTE); EPITAXIAL LAYERS; UNDERWATER COMMUNICATIONS;

ELASTIC MODULI; EPITAXIAL GROWTH; FINITE ELEMENT METHOD; GRAIN BOUNDARIES; HETEROJUNCTIONS; LIGHT EMITTING DIODES; MOLECULAR BEAM EPITAXY; PROBLEM SOLVING; RESIDUAL STRESSES; SUBSTRATES; THERMAL STRESS; THIN FILMS;

GALLIUM NITRIDE;

EID: 4444274331 PISSN: 00222461 EISSN: None Source Type: Journal
DOI: 10.1023/B:JMSC.0000040094.33095.6f Document Type: Article

Times cited : (41)

References (48)

1
- 21544461610
- and references there in
- H. MORKOC, S. STRITE, G. B. GAO, M. E. LIN, B. SVERDLOV and M. BURNS, J. Appl. Phys. 76 (1994) 1363 and references there in.
- (1994) J. Appl. Phys. , vol.76 , pp. 1363
- Morkoc, H.¹ Strite, S.² Gao, G.B.³ Lin, M.E.⁴ Sverdlov, B.⁵ Burns, M.⁶

2
- 0031073768
- GaN and Related Materials for Device Applications, Materials Research Society Bulletin (1997), Vol. 22.
- (1997) GaN and Related Materials for Device Applications, Materials Research Society Bulletin , vol.22

3
- 36449007167
- R. J. MOLNAR, R. SINGH and T. D. MOUSTAKAS, Appl. Phys. Lett. 66 (1995) 268.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 268
- Molnar, R.J.¹ Singh, R.² Moustakas, T.D.³

4
- 0006244399
- S. NAKAMURA, T. MUKAI and M. SENOH, J. Appl. Phys. 76 (1994) 8189.
- (1994) J. Appl. Phys. , vol.76 , pp. 8189
- Nakamura, S.¹ Mukai, T.² Senoh, M.³

5
- 0014595810
- H. P. MARUSKA and J. J. TIETJEN, Appl. Phys. Lett. 15 (1969) 327.
- (1969) Appl. Phys. Lett. , vol.15 , pp. 327
- Maruska, H.P.¹ Tietjen, J.J.²

6
- 5544310194
- M. ILEGEMS and H. C. MONTGOMETRY, J. Phys. Chem. Solids 34 (1973) 885.
- (1973) J. Phys. Chem. Solids , vol.34 , pp. 885
- Ilegems, M.¹ Montgometry, H.C.²

7
- 0000395858
- G. JACOB, M. BOULOU and M. FURTADO, J. Cryst. Growth 42 (1977) 136.
- (1977) J. Cryst. Growth , vol.42 , pp. 136
- Jacob, G.¹ Boulou, M.² Furtado, M.³

8
- 84956227761
- H. M. MANASEVIT, F. M. ERDMANN and W. I. SIMPSON, J. Electrochem. Soc. 118 (1971) 1864.
- (1971) J. Electrochem. Soc. , vol.118 , pp. 1864
- Manasevit, H.M.¹ Erdmann, F.M.² Simpson, W.I.³

9
- 0040577815
- J. W. ANDREW and M. A. LITTLEJOHN, ibid. 122 (1975) 1273.
- (1975) J. Electrochem. Soc. , vol.122 , pp. 1273
- Andrew, J.W.¹ Littlejohn, M.A.²

10
- 0021513561
- T. KAWABATA, T. MATSUDA and S. KOIKE, J. Appl. Phys. 56 (1984) 2367.
- (1984) J. Appl. Phys. , vol.56 , pp. 2367
- Kawabata, T.¹ Matsuda, T.² Koike, S.³

11
- 0040580183
- I. P. NIKITINA and V. A. DMITRIEV, Inst. Phys. Conf. Ser. 141 (1995) 431.
- (1995) Inst. Phys. Conf. Ser. , vol.141 , pp. 431
- Nikitina, I.P.¹ Dmitriev, V.A.²

12
- 33751127103
- T. W. WEEKS, M. D. BREMSER, K. S. AILEY, E. CARLSON, W. G. PERRY and R. F. DAVIS, Appl. Phys. Lett. 67 (1995) 401.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 401
- Weeks, T.W.¹ Bremser, M.D.² Ailey, K.S.³ Carlson, E.⁴ Perry, W.G.⁵ Davis, R.F.⁶

13
- 4043057766
- T. D. MOUSTAKAS, R. P. VAUDO, R. SINGH, D. KORAKAKIS, M. MISRA, A. SAMPATH and I. D. GOEPFERT, Inst. Phys. Conf. Ser. 142 (1996) 833.
- (1996) Inst. Phys. Conf. Ser. , vol.142 , pp. 833
- Moustakas, T.D.¹ Vaudo, R.P.² Singh, R.³ Korakakis, D.⁴ Misra, M.⁵ Sampath, A.⁶ Goepfert, I.D.⁷

14
- 0000457472
- M. E. LIN, S. STRITE, A. AGARWAL, A. SALVADOR, G. L. ZHOU, N. TERAGUCHI, A. ROCKETT and H. MORKOC, Appl. Phys. Lett. 62 (1993) 702.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 702
- Lin, M.E.¹ Strite, S.² Agarwal, A.³ Salvador, A.⁴ Zhou, G.L.⁵ Teraguchi, N.⁶ Rockett, A.⁷ Morkoc, H.⁸

15
- 0000346939
- YU V. MELNIK, I. P. NIKITINA, A. S. ZUBRILOV, A. A. SITNIKOVA, Y. G. MUSIKHIN and V.A. DMITRIEV, Inst. Phys. Conf. Ser. 142 (1996) 863.
- (1996) Inst. Phys. Conf. Ser. , vol.142 , pp. 863
- Melnik, Yu.V.¹ Nikitina, I.P.² Zubrilov, A.S.³ Sitnikova, A.A.⁴ Musikhin, Y.G.⁵ Dmitriev, V.A.⁶

16
- 0029726914
- R. J. MOLNAR, R. AGGARWAL, Z. L. LIAU, E. R. BROWN, I. MELNGAILIS, W. GUTZ, L. T. ROMANO and N. M. JOHNSON, Mater. Res. Soc. Symp. Proc. 395 (1996) 189.
- (1996) Mater. Res. Soc. Symp. Proc. , vol.395 , pp. 189
- Molnar, R.J.¹ Aggarwal, R.² Liau, Z.L.³ Brown, E.R.⁴ Melngailis, I.⁵ Gutz, W.⁶ Romano, L.T.⁷ Johnson, N.M.⁸

17
- 0025232939
- K. NANIWAE, S. ITOH, H. AMANO, K. ITOH, K. HIRAMATSU and I. AKASAKI, J. Cryst. Growth 99 (1990) 381.
- (1990) J. Cryst. Growth , vol.99 , pp. 381
- Naniwae, K.¹ Itoh, S.² Amano, H.³ Itoh, K.⁴ Hiramatsu, K.⁵ Akasaki, I.⁶

18
- 0031386519
- H. Q. LU, I. B. BHAT, B. C. LEE, G. A. SLACK and L. J. SCHOWALTER, MRS Symp. Proc. 482 (1997) 277.
- (1997) MRS Symp. Proc. , vol.482 , pp. 277
- Lu, H.Q.¹ Bhat, I.B.² Lee, B.C.³ Slack, G.A.⁴ Schowalter, L.J.⁵

19
- 0000971080
- H. LIU, A. C. FRENKEL, J. G. KIM and R. M. PARK, J. Appl. Phys. 74 (1993) 6124.
- (1993) J. Appl. Phys. , vol.74 , pp. 6124
- Liu, H.¹ Frenkel, A.C.² Kim, J.G.³ Park, R.M.⁴

20
- 77956669164
- M. J. PAISLEY, Z. SITAR, J. B. POSTHILL and R. F. DAVIS, J. Vac. Sci. Technol. A 7 (1989) 701.
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 701
- Paisley, M.J.¹ Sitar, Z.² Posthill, J.B.³ Davis, R.F.⁴

21
- 0003167903
- J. G. KIM, A. C. FRENKEL, H. LIU and R. M. PARK, Appl. Phys. Lett. 65 (1994) 91.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 91
- Kim, J.G.¹ Frenkel, A.C.² Liu, H.³ Park, R.M.⁴

22
- 0030697555
- D. A. S. LOEBER, N. G. ANDERSON, J. M. REDWING, J. S. FLYNN, G. M. SMITH and M. A. TISCHLER, MRS Symp. Proc. 449 (1997) 1203.
- (1997) MRS Symp. Proc. , vol.449 , pp. 1203
- Loeber, D.A.S.¹ Anderson, N.G.² Redwing, J.M.³ Flynn, J.S.⁴ Smith, G.M.⁵ Tischler, M.A.⁶

23
- 0006076508
- Y. MORIMOTO, K. UCHIHO and S. USHIO, J. Electrochem. Soc. 120 (1973) 1783.
- (1973) J. Electrochem. Soc. , vol.120 , pp. 1783
- Morimoto, Y.¹ Uchiho, K.² Ushio, S.³

24
- 0008362603
- T. LEI, M. FANCIULLI, R. MOLNAR, T. MOUSTAKAS, R. GRAHAM and J. SCANLON, Appl. Phys. Lett. 59 (1991) 944.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 944
- Lei, T.¹ Fanciulli, M.² Molnar, R.³ Moustakas, T.⁴ Graham, R.⁵ Scanlon, J.⁶

25
- 0026206651
- Y. SOMENO, M. SASAKI and T. HIRAI, J. Jpn. Appl. Phys. 30 (1991) 1792.
- (1991) J. Jpn. Appl. Phys. , vol.30 , pp. 1792
- Someno, Y.¹ Sasaki, M.² Hirai, T.³

26
- 0000469417
- J. L. DEPUIE and E. GULARI, Appl. Phys. Lett. 59 (1991) 549.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 549
- Depuie, J.L.¹ Gulari, E.²

27
- 0041776248
- T. LEI, T. D. MOUSTAKAS, R. J. GRAHAM, Y. HE and S. J. BERKOWITZ, J. Appl. Phys. 71 (1992) 1.
- (1992) J. Appl. Phys. , vol.71 , pp. 1
- Lei, T.¹ Moustakas, T.D.² Graham, R.J.³ He, Y.⁴ Berkowitz, S.J.⁵

28
- 0000367120
- N. ITOH, J. C. RHEE, T. KAWABATA and S. KOIKE, ibid. 58 (1985) 1828.
- (1985) J. Appl. Phys. , vol.58 , pp. 1828
- Itoh, N.¹ Rhee, J.C.² Kawabata, T.³ Koike, S.⁴

29
- 0027575890
- K. HIRAMATSU, T. DETCHPROHM and I. AKASAKI, Jpn. J. Appl. Phys. 32 (1993) 1528.
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 1528
- Hiramatsu, K.¹ Detchprohm, T.² Akasaki, I.³

30
- 0035945142
- J. KECKES, I. W. GERLACH, R. AVERBECK, H. RIECHERT, S. BADER, B. HAHN, H.-J. LUGAUER, A. LELL, V. HARLE, A. WENZEL and B. RAUCHENBACH, Appl. Phys. Lett. 79(26) (2001) 4307.
- (2001) Appl. Phys. Lett. , vol.79 , Issue.26 , pp. 4307
- Keckes, J.¹ Gerlach, I.W.² Averbeck, R.³ Riechert, H.⁴ Bader, S.⁵ Hahn, B.⁶ Lugauer, H.-J.⁷ Lell, A.⁸ Harle, V.⁹ Wenzel, A.¹⁰ Rauchenbach, B.¹¹

31
- 0030685558
- J. W. AGER III, T. SUSKI, S. RUVIMOV, J. KRUEGER, G. CONTI, E. R. WEBER, M. D. BREMSER, R. DAVIS and C. P. KUO, Mater. Res. Soc. Symp. Proc. 449 (1997) 775.
- (1997) Mater. Res. Soc. Symp. Proc. , vol.449 , pp. 775
- Ager III, J.W.¹ Suski, T.² Ruvimov, S.³ Krueger, J.⁴ Conti, G.⁵ Weber, E.R.⁶ Bremser, M.D.⁷ Davis, R.⁸ Kuo, C.P.⁹

32
- 0342840996
- T. KOZAWA, T. KACHI, H. KANO, H. NAGASE, N. KOIDE and K. MANABE, J. Appl. Phys. 77(9) (1995) 4389.
- (1995) J. Appl. Phys. , vol.77 , Issue.9 , pp. 4389
- Kozawa, T.¹ Kachi, T.² Kano, H.³ Nagase, H.⁴ Koide, N.⁵ Manabe, K.⁶

33
- 0032614536
- T. S. ZHELEVA, A. M. ASHMAWI, O. H. NAM and R. F. DAVIS, Appl. Phys. Lett. 74 (1999) 2492.
- (1999) Appl. Phys. Lett. , vol.74 , pp. 2492
- Zheleva, T.S.¹ Ashmawi, A.M.² Nam, O.H.³ Davis, R.F.⁴

34
- 0030651609
- W. G. PERRY, T. ZHELEVA, K. J. LINTHICUM, M. D. BREMSER, R. F. DAVIS, W. SHAN and J. J. SONG, Mater. Res. Soc. Symp. Proc. 449 (1997) 847.
- (1997) Mater. Res. Soc. Symp. Proc. , vol.449 , pp. 847
- Perry, W.G.¹ Zheleva, T.² Linthicum, K.J.³ Bremser, M.D.⁴ Davis, R.F.⁵ Shan, W.⁶ Song, J.J.⁷

35
- 4444333668
- K. WANG and R. R. REEBER, ibid. 537 (1999) G3.18.1.
- (1999) Mater. Res. Soc. Symp. Proc. , vol.537
- Wang, K.¹ Reeber, R.R.²

36
- 0017504881
- G. H. OLSEN and M. ETTENBERG, J. Appl. Phys. 48 (1977) 2543.
- (1977) J. Appl. Phys. , vol.48 , pp. 2543
- Olsen, G.H.¹ Ettenberg, M.²

37
- 84987058195
- V. A. SAVASTENKO and A. U. SHELEG, Phys. Status Solidi A 48 (1978) K135.
- (1978) Phys. Status Solidi A , vol.48
- Savastenko, V.A.¹ Sheleg, A.U.²

38
- 0031348654
- K. WANG and R. R. REEBER, Mater. Res. Soc. Symp. Proc. 482 (1998) 863.
- (1998) Mater. Res. Soc. Symp. Proc. , vol.482 , pp. 863
- Wang, K.¹ Reeber, R.R.²

39
- 0022115013
- K. TSUBOUCHI and N. MIKOSHIBA, IEEE Trans. Sonics Ultrason. SU-32 (1985) 634.
- (1985) IEEE Trans. Sonics Ultrason. , vol.SU-32 , pp. 634
- Tsubouchi, K.¹ Mikoshiba, N.²

40
- 0027681782
- J. ROSS, M. RUBIN and T. K. GUSTAFSON, J. Mater. Res. 8 (10) (1993) 2613.
- (1993) J. Mater. Res. , vol.8 , Issue.10 , pp. 2613
- Ross, J.¹ Rubin, M.² Gustafson, T.K.³

41
- 0003484268
- Academic Press, New York
- H. B. HUNTINGTON,"The Elastic Constants of Crystals" (Academic Press, New York, 1958) p. 70.
- (1958) The Elastic Constants of Crystals , pp. 70
- Huntington, H.B.¹

42
- 0003432018
- Plenum Press, New York
- Y. S. TOULOUKIAN, R. K. KIRBY, R. E. TAYLOR and T. Y. R. LEE (eds.), "Thermophysical Properties of Matter" (Plenum Press, New York, 1977) Vol. 13.
- (1977) Thermophysical Properties of Matter , vol.13
- Touloukian, Y.S.¹ Kirby, R.K.² Taylor, R.E.³ Lee, T.Y.R.⁴

43
- 0001598977
- G. ARLT and G. R. SCHODDER, Jr., J. Acoust. Soc. Amer. 37 (1965) 384.
- (1965) J. Acoust. Soc. Amer. , vol.37 , pp. 384
- Arlt, G.¹ Schodder Jr., G.R.²

44
- 0022897519
- Z. LI and R. C. BRADT, J. Amer. Ceram. Soc. 69(12) (1986) 863.
- (1986) J. Amer. Ceram. Soc. , vol.69 , Issue.12 , pp. 863
- Li, Z.¹ Bradt, R.C.²

45
- 0029712422
- R. R. REEBER and K. WANG, Mater. Res. Soc. Symp. Proc. 410 (1996) 211.
- (1996) Mater. Res. Soc. Symp. Proc. , vol.410 , pp. 211
- Reeber, R.R.¹ Wang, K.²

46
- 0042334407
- Z. LI and R. C. BRADT, J. Appl. Phys. 60(2) (1986) 612.
- (1986) J. Appl. Phys. , vol.60 , Issue.2 , pp. 612
- Li, Z.¹ Bradt, R.C.²

47
- 0001545613
- H. J. MCSKIMIN and P. ANDREACH, Jr., ibid. 35 (1964) 2161.
- (1964) J. Appl. Phys. , vol.35 , pp. 2161
- Mcskimin, H.J.¹ Andreach Jr., P.²

48
- 0030284096
- R. R. REEBER and K. WANG, Mater. Chem. Phys. 46 (1996) 259.
- (1996) Mater. Chem. Phys. , vol.46 , pp. 259
- Reeber, R.R.¹ Wang, K.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.