Thermal expansion of GaN and AlN

Materials Research Society Symposium - Proceedings

Volumn 482, Issue , 1997, Pages 863-868

  Wang, Kai ^a   Reeber, Robert P ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; EPITAXIAL GROWTH; EQUATIONS OF STATE OF SOLIDS; LATTICE CONSTANTS; NITRIDES; RESIDUAL STRESSES; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR DEVICE MODELS; STRESS CONCENTRATION; THERMAL EFFECTS; THERMAL EXPANSION;

ALUMINUM NITRIDE; GALLIUM NITRIDE;

SEMICONDUCTING FILMS;

EID: 0031348654     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (33)