Sub-100-nm photolithography based on plasmon resonance

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 6 B, 2004, Pages 4017-4021

  Luo, Xiangang ^a   Ishihara, Teruya ^a  

^a Japan Science and Technology Agency   (Japan)

Author keywords

Nanolithography; Near field optics; Photolithography; Plasmon resonance; Subwavelength resolution

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELDS; INTERFEROMETRY; ION BEAM LITHOGRAPHY; NANOTECHNOLOGY; PHASE SHIFT; PHOTORESISTS; QUANTUM THEORY; SURFACE PLASMON RESONANCE; VECTORS;

NEAR-FIELD OPTICS; PLASMON RESONANCE; QUANTUM DEVICES; SUBWAVELENGTH RESOLUTION;

PHOTOLITHOGRAPHY;

EID: 4444250632     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.4017     Document Type: Conference Paper

References (23)

1. S. Y. Chou, P. R. Krauss and P. J. Renstrom: J. Vac. Sci. & Technol. B 14 (1996) 4129.
2. M. A. McCord: J. Vac. Sci. & Technol. B 15 (1997) 2125.
3. J. Melngailis: Nucl. Instrum. & Methods B 80 (1993) 1271.
4. M. A. McCord and R. F. W. Pease: J. Vac. Sci. & Technol. B 4 (1986) 86.
5. Z. Betzig and J. K. Trautman: Science 257 (1992) 189.
6. M. Rothschild, T. M. Bloomstein, J. E. Curtin, D. K. Downs, T. H. Fedynyshyn, D. E. Hardy, R. R. Kunz, V. Liberman, J. H. C. Sedlacek, R. S. Uttaro, A. K. Bates and C. Van Peski: J. Vac. Sci. & Technol. B 17 (1999) 3262.
7. C. W. Gwyn, R. Stulen, D. Sweeney and D. Attwood: J. Vac. Sci. & Technol. B 16 (1998) 3142.
8. J. P. Silverman: J. Vac. Sci. & Technol. B 16 (1998) 3137.
9. M. M. Alkaisi, R. J. Blaikie, S. J. McNab, R. Cheung and D. R. S. Cumming: Appl. Phys. Lett. 75 (1999) 3560.
10. J. G. Goodberlet: Appl. Phys. Lett. 76 (2000) 667.
11. R. J. Blaikie and S. McNab: Appl. Opt. 40 (2001) 1692.
12. S. J. McNab and R. J. Blaikie: Appl. Opt. 39 (2000) 20.
13. H. A. Bethe: Phys. Rev. 66 (1944) 163.
14. X. Luo and T. Ishihara: Int. J. Nanoscience l (2002) 657.
15. T. W. Ebbesen, H. L. Lezec, H. F. Ghaemi, T. Thio and P. A. Wolff: Nature 391 (1998) 667.
16. H. F. Ghaemi, T. Thio, D. E. Grupp, T. W. Ebbesen and H. J. Lezec: Phys. Rev. B 58 (1998) 6779
17. L. Salomon, F. Grillot, A. Zayats and F. De Fornel: Phys. Rev. Lett. 86 (2001) 1110.
18. E. Popov, M. Neviere, S. Enoch and R. Reinisch: Phys. Rev. B 62 (2000) 16100.
19. U. Schroter and D. Heitmann: Phys. Rev. B 58 (1998) 15419.
20. L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry and T. W. Ebbesen: Phys. Rev. Lett. 86 (2001) 1114.
21. J. A. Porto, F. J. Garcia-Vidal and J. B. Pendry: Phys. Rev. Lett. 83 (1999) 2845.
22. Handbook of Optical Constants of Solids, ed. E. D. Palik (Academic, Orlando, 1985) p. 350.
23. H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal and T. W. Ebbesen: Science 297 (2002) 820.