Contrast in the evanescent near field of λ/20 period gratings for photolithography

Applied Optics

Volumn 39, Issue 1, 2000, Pages 20-25

  McNab, Sharee J ^a   Blaikie, Richard J ^a  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002575499     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.000020     Document Type: Article

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