메뉴 건너뛰기




Volumn 2, Issue , 2004, Pages 564-569

A novel technique for in-plane thermal conductivity measurements of electrically conductive interconnects and nanostructures

Author keywords

Interconnects; Measurement Technique; Self heating; Thermal Conductivity

Indexed keywords

INTERCONNECTS; MEASUREMENT TECHNIQUES; SELF HEATING;

EID: 4444226943     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (7)

References (24)
  • 2
    • 0015655591 scopus 로고
    • Method for the determination of the thermophysical properties of evaporated thin films
    • Boiko, B.T., Pugachev, A.T., and Bratsychin, V.M., 1973, "Method for the determination of the thermophysical properties of evaporated thin films," Thin Solid Films, Vol. 17, No. 2, pp.157-61.
    • (1973) Thin Solid Films , vol.17 , Issue.2 , pp. 157-161
    • Boiko, B.T.1    Pugachev, A.T.2    Bratsychin, V.M.3
  • 5
  • 6
  • 7
    • 0035305444 scopus 로고    scopus 로고
    • Local joule heating and overall resistance increase in void-containing aluminum interconnects
    • Shen, Y.-L., 2001, "Local joule heating and overall resistance increase in void-containing aluminum interconnects," Journal of Electronic Materials, Vol. 30, No. 4, pp.367-71.
    • (2001) Journal of Electronic Materials , vol.30 , Issue.4 , pp. 367-371
    • Shen, Y.-L.1
  • 8
    • 0031558875 scopus 로고    scopus 로고
    • Investigating the thermodynamics and kinetics of thin film reactions by differential scanning calorimetry
    • Michaelsen, C., Barmak, K., and Weihs, T. P., 1997, "Investigating the thermodynamics and kinetics of thin film reactions by differential scanning calorimetry," Journal of Physics D: Applied Physics, Vol. 30, pp.3167-86.
    • (1997) Journal of Physics D: Applied Physics , vol.30 , pp. 3167-3186
    • Michaelsen, C.1    Barmak, K.2    Weihs, T.P.3
  • 9
    • 1842589357 scopus 로고    scopus 로고
    • Thermal conductivity measurement of thin aluminum layers using steady-state joule heating and electrical resistance thermometry in suspended bridges
    • November 15-21, 2003, Washington, D.C., USA
    • Reifenberg, J., England, Voss, R., J., Rao, P., Schmitt, W., Yang, Y., Liu, W., Sadeghipour, S. M., and Asheghi, M., 2003, "Thermal conductivity measurement of thin aluminum layers using steady-state joule heating and electrical resistance thermometry in suspended bridges," ASME International Mechanical Engineering Congress & Exposition, IMECE-42055, November 15-21, 2003, Washington, D.C., USA.
    • (2003) ASME International Mechanical Engineering Congress & Exposition , vol.IMECE-42055
    • Reifenberg, J.1    England2    Voss, R.3    Rao, P.4    Schmitt, W.5    Yang, Y.6    Liu, W.7    Sadeghipour, S.M.8    Asheghi, M.9
  • 10
    • 0000606184 scopus 로고
    • Thermal resistance at interfaces
    • Swartz, E.T. and Fohl, R.O., 1987, "Thermal resistance at interfaces," Applied Physics Letters, Vol. 51, No. 26, pp.2200-2.
    • (1987) Applied Physics Letters , vol.51 , Issue.26 , pp. 2200-2202
    • Swartz, E.T.1    Fohl, R.O.2
  • 11
    • 0026367826 scopus 로고
    • A characterization of components for an optimized CMOS input protection system
    • Rome, NY, USA, EOS/ESD Assoc, 1991
    • Orchard-Webb, J.H., 1991, "A characterization of components for an optimized CMOS input protection system," Electrical Overstress/ Electrostatic Discharge Symposium Proceedings, Rome, NY, USA, EOS/ESD Assoc, 1991, pp. 83-7.
    • (1991) Electrical Overstress/Electrostatic Discharge Symposium Proceedings , pp. 83-87
    • Orchard-Webb, J.H.1
  • 13
    • 0000263715 scopus 로고
    • A novel method for measuring the thermal conductivity of submicrometre thick dielectric films
    • Okuda, M. and Ohkubo, S., 1992, "A novel method for measuring the thermal conductivity of submicrometre thick dielectric films," Thin Solid Films, Vol. 213, No. 2, pp. 176-81.
    • (1992) Thin Solid Films , vol.213 , Issue.2 , pp. 176-181
    • Okuda, M.1    Ohkubo, S.2
  • 14
    • 36549099049 scopus 로고
    • Thermal conductivity measurement from 30 to 750K: The 3ω method
    • Cahill, D.G., 1990, "Thermal conductivity measurement from 30 to 750K: the 3ω method," Review of Scientific Instruments, Vol. 61, No. 2, pp.802-8.
    • (1990) Review of Scientific Instruments , vol.61 , Issue.2 , pp. 802-808
    • Cahill, D.G.1
  • 16
    • 0031094623 scopus 로고    scopus 로고
    • Heat transport in thin dielectric films
    • Lee S.-M. and Cahill, D.G., 1997, "Heat transport in thin dielectric films," Journal of Applied Physics, Vol. 81, No. 6, pp.2590-5.
    • (1997) Journal of Applied Physics , vol.81 , Issue.6 , pp. 2590-2595
    • Lee, S.-M.1    Cahill, D.G.2
  • 17
    • 0032615074 scopus 로고    scopus 로고
    • Process-dependent thermal transport properties of silicon-dioxide films deposited using low-pressure chemical vapor deposition
    • Ju, Y.S. and Goodson, K.E., 1999, "Process-dependent thermal transport properties of silicon-dioxide films deposited using low-pressure chemical vapor deposition," Journal of Applied Physics, Vol. 85, No. 9, pp.7130-4.
    • (1999) Journal of Applied Physics , vol.85 , Issue.9 , pp. 7130-7134
    • Ju, Y.S.1    Goodson, K.E.2
  • 20
    • 0033534934 scopus 로고    scopus 로고
    • Thermal characterization of anisotropic thin dielectric films using harmonic Joule heating
    • Ju, Y.S. and Goodson, K.E., 1999b, "Thermal characterization of anisotropic thin dielectric films using harmonic Joule heating," Thin Solid Films, Vol. 339, No. 1-2, pp.l60-4.
    • (1999) Thin Solid Films , vol.339 , Issue.1-2
    • Ju, Y.S.1    Goodson, K.E.2
  • 22
    • 0035397356 scopus 로고    scopus 로고
    • 3 Omega method for specific heat and thermal conductivity measurements
    • Lu, L., Yi, W., and Zhang, D.L., 2001, "3 omega method for specific heat and thermal conductivity measurements," Review of Scientific Instruments, Vol. 72, No. 7, pp.2996-03.
    • (2001) Review of Scientific Instruments , vol.72 , Issue.7 , pp. 2996-3003
    • Lu, L.1    Yi, W.2    Zhang, D.L.3
  • 23
    • 18244390620 scopus 로고
    • Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films
    • Tai, Y.C., Mastrangelo, C.H., and Muller, R.S., 1988, "Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films," Journal of Applied Physics, Vol. 63, No. 5, pp.1442-7.
    • (1988) Journal of Applied Physics , vol.63 , Issue.5 , pp. 1442-1447
    • Tai, Y.C.1    Mastrangelo, C.H.2    Muller, R.S.3
  • 24
    • 0036537098 scopus 로고    scopus 로고
    • Numerical simulation of the 3 omega method for measuring the thermal conductivity
    • Jacquot, A., Lenoir, B., Dauscher, A., Stolzer, M., and Meusel, J., 2002, "Numerical simulation of the 3 omega method for measuring the thermal conductivity" Journal of Applied Physics, Vol. 91, No. 7, pp.4733-8.
    • (2002) Journal of Applied Physics , vol.91 , Issue.7 , pp. 4733-4738
    • Jacquot, A.1    Lenoir, B.2    Dauscher, A.3    Stolzer, M.4    Meusel, J.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.