Investigating the thermodynamics and kinetics of thin film reactions by differential scanning calorimetry

Journal of Physics D: Applied Physics

Volumn 30, Issue 23, 1997, Pages 3167-3186

  Michaelsen, C ^a   Barmak, K ^b   Weihs, T P ^c  

^a INSTITUTE OF MATERIALS RESEARCH   (Germany)

^b Lehigh University   (United States)

^c Whiting School of Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETERS; CRYSTALLIZATION; DIFFERENTIAL SCANNING CALORIMETRY; ENTHALPY; FILM GROWTH; FILM PREPARATION; INTERFACES (MATERIALS); METALLIC FILMS; NUCLEATION; PHASE TRANSITIONS; SPECIFIC HEAT OF SOLIDS; THERMODYNAMICS;

HEATS OF FORMATION; LAYERED THIN FILMS; THIN FILM REACTIONS;

THIN FILMS;

EID: 0031558875     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/23/001     Document Type: Review

References (100)

1. Brauman J and Szuromi P 1996 Science 273 855
2. Barbee T W 1990 MRS Bull. 15 (2) 17
3. Spiller E 1994 Soft X-ray Optics (Bellingham: SPIE Optical Engineering)
4. Perepezko J H, da Silva Bassani M H, Park J S, Edelstein A S and Everett R K 1995 Mater. Sci. Eng. A 195 1
5. Barbee T W Jr and Weihs T P 1996 USA patent 5538795
6. Makowiecki D M and Bionta R M 1995 USA patent 05381944
7. Weihs T P 1997 Handbook of Thin Film Process Technology part B section F.7 (Bristol: IOP Publishing)
8. Spaepen F and Thompson C V 1989 Appl. Surf. Sci. 38 1
9. 1970 Thermal Analy. Newsletter (Perkin Elmer) 9
10. McNaughton J L and Mortimer C T 1975 IRS Physical Chemistry Series 2 10
11. Pope M I and Judd M D 1977 Differential Thermal Analysis - A Guide to the Technique and its Applications (London: Heyden & Son)
12. Watson E S, O'Neill M J, Justin J and Brenner N 1964 Anal. Chem. 36 1233
13. O'Neill M J 1964 Anal. Chem. 36 1238
14. Greer A L 1982 Acta Metall. 30 171
15. Hohne G W H and Gloggler E 1989 Thermochim. Acta 151 295
16. Boersma S L 1955 J. Am. Ceram. Soc. 38 281
17. Chen R and Kirsh Y 1981 Analysis of Thermally Simulated Processes (Oxford: Pergamon)
18. Coffey KR 1989 PhD Thesis Institute of Technology, Cambridge, MA
19. Brown M E 1988 introduction to Thermal Analysis, Techniques and Applications (New York: Chapman and Hall)
20. Denlinger D W, Abarra E N, Allen K, Rooney P W, Messer M T, Watson S K and Hellman F 1994 Rev. Sci. Instrum. 65 946
21. Ohring M 1992 The Materials Science of Thin Flms (Boston: Academic)
22. Weihs T P, Barbee T W Jr and Wall M A 1997 Acta. Mater. 45 2307
23. Weihs T P, Wall M A and Barbee T W Jr 1993 Mater. Res. Soc. Symp. Proc. 311 85
24. Ma E, Clevenger L A and Thompson C 1992 J. Mater. Res. 7 1350
25. Coffey K R, Barmak K, Rudman D A and Foner S 1992 J. Appl. Phys. 72 1341
26. Michaelsen C, Lucadamo G and Barmak K 1996 J. Appl. Phys. 80 6689
27. Barmak K, Michaelsen C and Lucadamo G 1997 J. Mater. Res. 12 1323
28. Bormann R, Gärtner F and Haider F 1988 Mater. Sci. Eng. 97 79
29. Kleppa O J 1994 J. Phase Equil. 15 240
30. Kubaschewski O and Alcock C B 1979 Metallurgical Thermochemistry (New York: Pergamon)
31. Weihs T P, Wall M A and Barbee T W Jr 1996 J. Mater. Res. 11 1403
32. Kleppa O J and Watanabe S 1982 Metall. Trans. B 13 391
33. Gachon J C and Hertz J 1983 CALPHAD 7 1
34. Arias D and Abriata J P 1990 Bull. Alloy Phase Diagrams 11 452
35. Hultgren R, Orr R L, Anderson P D and Kelley K K 1963 Selected Values of Thermodynamic Properties of Metals and Alloys (New York: Wiley)
36. Although Ni/Al multilayers may not form a solid solution atthe interface, they are known to form the B2 NiAl phase which has a broad composition range and therefore can produce a smooth variation in composition. For details concerning the formation of the B2 phase see [26, 27].
37. Weihs T P, Wall M A and Barbee T W Jr 1995 Mater. Res. Soc. Symp. Proc. 382 21
38. Meschel S V and Kleppa O J 1993 J. Alloys Compounds 191 111
39. Kematick R J and Franzen H F 1984 J. Solid State Chem. 54 226
40. Wagner C, Vazquez J, Villares P and Jimenezgaray R 1994 Mater. Lett. 18 280
41. Liu R, Williams D S and Lynch W T 1986 IEDM Technical Digest 1986 p 58
42. Probst V, Schaber H, Mitwalsky A, Kazba H, van den Hove L and Maex K 1991 J. Appl. Phys. 70 708
43. Hong Q Z, Barmak K and Clevenger L A 1992 J. Appl. Phys. 72 3423
44. Michaelsen C, Gente C and Bormann R 1997 J. Appl. Phys. 81 6024
45. Bormann R 1997 Thermodynamics of Alloy Formation ed Y A Chang and F Sommer (Warrendale: The Minerals Metals and Materials Society) pp 171-86
46. Michaelsen C, Gente C and Bormann R 1997 J. Mater. Res. 12 1463
47. Lee S M and Barmak K 1993 Mater. Res. Soc. Symp. Proc. 321 313
48. Lee S M 1994 Mater. Res. Soc. Symp. Proc. 343 101
49. Chen L C and Spaepen F 1991 J. Appl. Phys. 69 679
50. Murr L E 1975 Interfacial Phenomena in Metals and Alloys (London: Addison-Wesley)
51. The authors of [23] incorrectly equated the layer thickness to the average grain radius and therefore used g* = 1.3. The correct geometrical factor for calculating the grain boundary enthalpy is g* = 2.6.
52. Note that multilayer films have also been used to study interdiffusion since 1940 using other non-calorimetric techniques, in particular x-ray diffraction. For a review of these works see Greer A L and Spaepen F 1985 Synthetic Modulated Structures ed L L Chang and B C Giessen (New York: Academic)
53. Cotts E J, Meng W J and Johnson W L 1986 Phys. Rev. Lett. 57 2295
54. Highmore R J, Evetts J E, Greer A L and Somekh R E 1987 Appl. Phys. Lett. 50 566
55. Grosman D and Cotts E J 1993 Phys. Rev. B 48 5579
56. Donovan E P, Spaepen F, Turnbull D, Poate J M and Jacobson D C 1983 Appl. Phys. Lett. 42 698
57. Donovan E P, Spaepen F, Turnbull D, Poate J M and Jacobson D C 1985 J. Appl. Phys. 57 1795
58. Michaelsen C and Barmak K 1997 J. Alloys Compounds 257 211
59. Knauth P, Charai A, Bergmann C and Gas P 1994 J. Appl. Phys. 76 5195
60. Kissinger H E 1957 Anal. Chem. 29 1702
61. Mittemeijer E J 1992 J. Mater. Sci. 27 3977
62. Michaelsen C and Dahms M to be published
63. Michaelsen C, Wöhlert S, Bormann R and Barmak K 1996 Mater. Res. Soc. Symp. Proc. 398 245
64. Michaelsen C, Wöhlert S and Bormann R 1994 Mater. Res. Soc. Symp. Proc. 343 205
65. Barmak K, Michaelsen C, Rickman J and Dahms M 1996 Mater. Res. Soc. Symp. Proc. 403 51
66. Hong Q Z, Barmak K, Hong S Q and Clevenger L A 1993 J. Appl. Phys. 74 4958
67. Hewett C A, Suni I, Lau S S, Hung L S and Scott D M 1984 Mater. Res. Soc. Symp. Proc. 27 145
68. Ridgway M C, Elliman R G, Thornton R P and Williams J S 1990 Appl. Phys. Lett. 56 1992
69. Smith D A, Tu K N and Weiss B Z 1989 Ultramicroscopy 3090
70. Johnson W A and Mehl R F 1939 Trans. AIME 135 1
71. Avrami M 1939 J. Chem. Phys. 7 1103
72. Avrami M 1940 J. Chem. Phys. 8 212
73. Avrami M 1941 J. Chem. Phys. 9 177
74. Christian J W 1975 The Theory of Transformations in Metals and Alloys Part I Equilibrium and General Kinetic Theory (Oxford: Pergamon)
75. Michaelsen C and Dahms M 1996 Thermochim. Acta 288 9
76. Barmak K, Rickman J and Michaelsen C 1997 J. Electron. Mater. 91009
77. Barmak K, Vivekanand S, Ma F and Michaelsen C 1996 Mater. Res. Soc. Symp. Proc. 398 257
78. Barmak K, Coffey K R, Rudman D A and Foner S 1990 J. Appl. Phys. 67 7313
79. Barmak K, Michaelsen C, Vivekanand S and Ma F 1997 Phil. Mag. A at press
80. Ma E, Thompson C V and Clevenger L A 1991 J. Appl. Phys. 69 2211
81. Clevenger L A and Thompson C V 1990 J. Appl. Phys. 67 1325
82. Coffey K R, Clevenger L A, Barmak K, Rudman D A and Thompson C V 1989 Appl. Phys. Lett. 55 852
83. Clevenger L A, Thompson C V, de Avillez R R and Ma E 1990 J. Vac. Sci. Technol. A 8 1566
84. Ma E, Clevenger L A and Thompson C V 1992 J. Mater. Res. 7 1350
85. Highmore R J, Somekh R E, Evetts J E and Greer A L 1988 J. Less-Common Met. 140 353
86. Rickman J M, Tong W S and Barmak K 1997 Acta Mater. 45 1153
87. d'Heurle FM 1988 J. Mater. Res. 3 167
88. Coffey K R and Barmak K 1994 Mater. Res. Soc. Symp. Proc. 343 193
89. Coffey K R and Barmak K 1994 Acta Metall. Mater. 42 2905
90. Burke J E and Tumbull D 1952 Prog. Metal Phys. 3 220
91. Wagner C 1961 Z. Elektrochem. 65 581
92. Hillert M 1965 Acta Metall. 13 469
93. Thompson C V, Frost H J and Spaepen F 1987 Acta Metall. 35 887
94. Recent studies at 423 K by S M Lee also gave the activation energy for grain growth in Ge-31 at% Sn as 0.5 eV.
95. Ortega A, Perez-Maqueda L A and Criado J M 1996 Thermochim. Acta 282/283 29
96. Coats A W and Redfern J P 1964 Nature 201 68
97. Gösele U and Tu K N 1982 J. Appl. Phys. 53 3252
98. Gösele U and Tu K N 1989 J. Appl. Phys. 66 2619
99. Gösele U 1988 Alloying ed J L Walter and M R Jackson (Metals Park, OH: ASM International) pp 489-519
100. Blanpain B, Mayer J W, Liu J C and Tu K N 1990 J. Appl. Phys. 68 3259