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Journal of Applied Physics

Volumn 85, Issue 10, 1999, Pages 7130-7134

Process-dependent thermal transport properties of silicon-dioxide films deposited using low-pressure chemical vapor deposition

(2) Ju, Y S a Goodson, K E a

a Stanford University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CHEMICAL VAPOR DEPOSITION; HEAT CONDUCTION; SILICA; SPECIFIC HEAT OF SOLIDS; THERMOOXIDATION; THIN FILMS;

LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); ORIENTED MICROVOIDS;

DIELECTRIC FILMS;

EID: 0032615074 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.370523 Document Type: Article

Times cited : (64)

References (28)

1
- 0024069158
- A. H. Guenther and J. K. Mciver, Thin Solid Films 163, 203 (1988).
- (1988) Thin Solid Films , vol.163 , pp. 203
- Guenther, A.H.¹ Mciver, J.K.²

2
- 36549092939
- J. C. Lambropoulos, M. R. Jolly, C. A. Amsden, S. E. Gilman, M. J. Sinicropi, D. Diakomihalis, and S. D. Jacobs, J. Appl. Phys. 66, 4230 (1989).
- (1989) J. Appl. Phys. , vol.66 , pp. 4230
- Lambropoulos, J.C.¹ Jolly, M.R.² Amsden, C.A.³ Gilman, S.E.⁴ Sinicropi, M.J.⁵ Diakomihalis, D.⁶ Jacobs, S.D.⁷

3
- 0031268399
- Y. S. Ju and K. E. Goodson, IEEE Electron Device Lett. 18, 512 (1997).
- (1997) IEEE Electron Device Lett. , vol.18 , pp. 512
- Ju, Y.S.¹ Goodson, K.E.²

4
- 0000856591
- D. G. Cahill, M. Katiyar, and J. R. Abelson, Phys. Rev. B 50, 6077 (1994).
- (1994) Phys. Rev. B , vol.50 , pp. 6077
- Cahill, D.G.¹ Katiyar, M.² Abelson, J.R.³

5
- 0028462796
- D. G. Cahill and T. H. Allen, Appl. Phys. Lett. 65, 309 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 309
- Cahill, D.G.¹ Allen, T.H.²

6
- 0001679381
- S.-M. Lee and D. G. Cahill, Phys. Rev. B 52, 253 (1995).
- (1995) Phys. Rev. B , vol.52 , pp. 253
- Lee, S.-M.¹ Cahill, D.G.²

7
- 0031094623
- S.-M. Lee and D. G. Cahill, J. Appl. Phys, 81, 2590 (1997).
- (1997) J. Appl. Phys , vol.81 , pp. 2590
- Lee, S.-M.¹ Cahill, D.G.²

8
- 0027680846
- K. E. Goodson, M. I. Flik, L. T. Su, and D. A. Antoniadis, IEEE Electron Device Lett. 14, 490 (1993).
- (1993) IEEE Electron Device Lett. , vol.14 , pp. 490
- Goodson, K.E.¹ Flik, M.I.² Su, L.T.³ Antoniadis, D.A.⁴

9
- 0030244075
- M. B. Kleiner, S. A. Kühn, and W. Weber, IEEE Trans. Electron Devices 43, 1602 (1996).
- (1996) IEEE Trans. Electron Devices , vol.43 , pp. 1602
- Kleiner, M.B.¹ Kühn, S.A.² Weber, W.³

10
- 5244347502
- R. Landauer, J. Appl. Phys. 23, 779 (1952).
- (1952) J. Appl. Phys. , vol.23 , pp. 779
- Landauer, R.¹

11
- 0006442858
- edited by C. J. Cremers and H. A. Fine Plenum, New York
- D. G. Cahill, R. H. Tait, R. B. Stephens, S. K. Watson, and R. O. Pohl, in Thermal Conductivity, edited by C. J. Cremers and H. A. Fine (Plenum, New York, 1990), Vol. 21, pp. 3-16.
- (1990) Thermal Conductivity , vol.21 , pp. 3-16
- Cahill, D.G.¹ Tait, R.H.² Stephens, R.B.³ Watson, S.K.⁴ Pohl, R.O.⁵

12
- 0028513668
- C. J. Morath, H. J. Maris, J. J. Cuomo, D. L. Pappa, A. Grill, V. V. Patel, J. P. Doyle, and K. L. Saenger, J. Appl. Phys. 76, 2636 (1994).
- (1994) J. Appl. Phys. , vol.76 , pp. 2636
- Morath, C.J.¹ Maris, H.J.² Cuomo, J.J.³ Pappa, D.L.⁴ Grill, A.⁵ Patel, V.V.⁶ Doyle, J.P.⁷ Saenger, K.L.⁸

13
- 36549099049
- D. G. Cahill, Rev. Sci. Instrum. 61, 802 (1990).
- (1990) Rev. Sci. Instrum. , vol.61 , pp. 802
- Cahill, D.G.¹

14
- 0033534934
- Y. S. Ju, K. Kurabayashi, and K. E. Goodson, Thin Solid Films 339, 160 (1999).
- (1999) Thin Solid Films , vol.339 , pp. 160
- Ju, Y.S.¹ Kurabayashi, K.² Goodson, K.E.³

15
- 0000263715
- M. Okuda and S. Ohkubo, Thin Solid Films 213, 176 (1992).
- (1992) Thin Solid Films , vol.213 , pp. 176
- Okuda, M.¹ Ohkubo, S.²

16
- 0020736362
- A. C. Adams, Solid State Technol. 26, 135 (1983).
- (1983) Solid State Technol. , vol.26 , pp. 135
- Adams, A.C.¹

17
- 0013040482
- S. Rojas, L. Zanotti, A. Borghesi, A. Sassella, and G. U. Pignatel, J. Vac. Sci. Technol. B 11, 2081 (1993).
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2081
- Rojas, S.¹ Zanotti, L.² Borghesi, A.³ Sassella, A.⁴ Pignatel, G.U.⁵

18
- 0005958173
- N. Nagasima, J. Appl. Phys. 43, 3378 (1972).
- (1972) J. Appl. Phys. , vol.43 , pp. 3378
- Nagasima, N.¹

19
- 36149011343
- C. Kittel, Phys. Rev. 75, 972 (1949).
- (1949) Phys. Rev. , vol.75 , pp. 972
- Kittel, C.¹

20
- 0001660924
- R. C. Zeller and R. O. Pohl, Phys. Rev. B 4, 2029 (1971).
- (1971) Phys. Rev. B , vol.4 , pp. 2029
- Zeller, R.C.¹ Pohl, R.O.²

21
- 0001552783
- J. J. Freeman and A. C. Anderson, Phys. Rev. B 34, 5684 (1986).
- (1986) Phys. Rev. B , vol.34 , pp. 5684
- Freeman, J.J.¹ Anderson, A.C.²

22
- 0000220797
- A. Jagannathan, R. Orbach, and O. Entin-Wohlman, Phys. Rev. B 39, 13 465 (1989).
- (1989) Phys. Rev. B , vol.39 , pp. 13465
- Jagannathan, A.¹ Orbach, R.² Entin-Wohlman, O.³

23
- 0001149093
- P. B. Allen and J. L. Feldman, Phys. Rev. B 48, 12 581 (1993).
- (1993) Phys. Rev. B , vol.48 , pp. 12581
- Allen, P.B.¹ Feldman, J.L.²

24
- 0001230361
- J. L. Feldman, M. D. Kluge, P. B. Allen, and F. Wooten, Phys. Rev. B 48, 12 589 (1993).
- (1993) Phys. Rev. B , vol.48 , pp. 12589
- Feldman, J.L.¹ Kluge, M.D.² Allen, P.B.³ Wooten, F.⁴

25
- 0001004774
- P. Sheng and M. Zhou, Science 253, 539 (1991).
- (1991) Science , vol.253 , pp. 539
- Sheng, P.¹ Zhou, M.²

26
- 0024685943
- D. G. Cahill and R. O. Pohl, Solid State Commun. 70, 927 (1989).
- (1989) Solid State Commun. , vol.70 , pp. 927
- Cahill, D.G.¹ Pohl, R.O.²

27
- 0001293162
- D. G. Cahill, S. K. Watson, and R. O. Pohl, Phys. Rev. B 46, 6131 (1992).
- (1992) Phys. Rev. B , vol.46 , pp. 6131
- Cahill, D.G.¹ Watson, S.K.² Pohl, R.O.³

28
- 0027802687
- M.-A. Einarsrud, S. Haereid, and V. Wittwer, Sol. Energy Mater. Sol. Cells 31, 341 (1993).
- (1993) Sol. Energy Mater. Sol. Cells , vol.31 , pp. 341
- Einarsrud, M.-A.¹ Haereid, S.² Wittwer, V.³

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