A discretization approach to modeling capacitive MEMS filters

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 9, Issue , 2007, Pages 289-301

  Hammad, Bashar K ^a   Nayfeh, Ali H ^a   Abdel Rahman, Eihab ^b  

^a State University   (United States)

^b UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY VALUE PROBLEMS; CONTROL NONLINEARITIES; EIGENVALUES AND EIGENFUNCTIONS; ELECTROMECHANICAL FILTERS; MICROMECHANICAL RESONATORS; NATURAL FREQUENCIES; STRUCTURAL PANELS; GALERKIN METHODS; RESONATORS;

CAPACITIVE RESONATORS; CLOSED-FORM EXPRESSION; DISTRIBUTED PARAMETER SYSTEMS; EFFECTIVE NONLINEARITIES; ELECTRICAL NONLINEARITY; METHOD OF MULTIPLE SCALE; MICROMECHANICAL FILTER; REDUCED ORDER MODELS; EIGENVALUE PROBLEM (EVP; MICROBEAM CAPACITIVE RESONATORS; UNACTUATED FILTERS;

PROBLEM SOLVING; MEMS;

EID: 44349151768     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2007-42186     Document Type: Conference Paper

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