Optical proximity correction with linear regression

IEEE Transactions on Semiconductor Manufacturing

Volumn 21, Issue 2, 2008, Pages 263-271

  Gu, Allan ^a,b   Zakhor, Avideh ^a,b  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Hybrid OPC; Linear regression; Model based OPC; Optical proximity correction (OPC); Rule based OPC

Indexed keywords

COMPUTER SIMULATION; LINEAR REGRESSION; PHOTOLITHOGRAPHY; SILICON WAFERS;

OPTICAL PROXIMITY CORRECTION (OPC); PATTERN TRANSFER;

INTEGRATED CIRCUITS;

EID: 43949145292     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2008.2000283     Document Type: Conference Paper

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