Large-area optical proximity correction with a combination of rule-based and simulation-based methods

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers

Volumn 35, Issue 12 B, 1996, Pages 6347-6695

  Miyama, Sachiko ^a   Yamamoto, Kazuko ^a   Koyama, Kiyomi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; KNOWLEDGE BASED SYSTEMS; LOGIC GATES; SIMULATORS; TABLE LOOKUP;

CRITICAL DIMENSIONAL UNIFORMITY; ONE DIMENSIONAL; OPTICAL PROXIMITY CORRECTION; PROXIMITY EFFECT;

PHOTOLITHOGRAPHY;

EID: 0030411662     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Review

References (5)