Intelligent model-based OPC

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6154 III, Issue , 2006, Pages

  Huang, W C ^a   Lai, C M ^a   Luo, B ^a   Tsai, C K ^a   Chih, M H ^a   Lai, C W ^a   Kuo, C C ^a   Liu, R G ^a   Lin, H T ^a  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

Artificial neural network; Genetic algorithm; Model regression; Optical proximity correction; Radial basis function

Indexed keywords

CONVERGENCE OF NUMERICAL METHODS; ERROR CORRECTION; GENETIC ALGORITHMS; IMAGE SEGMENTATION; MATHEMATICAL MODELS; NEURAL NETWORKS; RADIAL BASIS FUNCTION NETWORKS; REGRESSION ANALYSIS;

ARTIFICIAL NEURAL NETWORK; INFORMATION-PROCESSING PARADIGM; MODEL REGRESSION; OPTICAL PROXIMITY CORRECTION;

PHOTOLITHOGRAPHY;

EID: 33745784589     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.657792     Document Type: Conference Paper

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