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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4691 I, Issue , 2002, Pages 188-195

Advanced hybrid optical proximity correction system with OPC segment library and model-based correction module

(6) Kotani, Toshiya a Kobayashi, Sachiko a Ichikawa, Hirotaka a Tanaka, Satoshi a Watanabe, Susumu a Inoue, Soichi a

Author keywords

ASIC; Block level lithographic layout verification; Concurrent development; Correction time; DRAM; Hybrid optical proximity correction tool; OPC segment library; Optical proximity correction; Optical proximity effects

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; DATA PROCESSING; DYNAMIC RANDOM ACCESS STORAGE; MASKS; ULSI CIRCUITS;

OPTICAL PROXIMITY CORRECTION (OPC);

PHOTOLITHOGRAPHY;

EID: 0036413557 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.474546 Document Type: Conference Paper

Times cited : (11)

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