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Volumn 11, Issue 7, 2008, Pages

Dielectric hafnium oxide improved by supercritical carbon dioxide fluid treatment for pentacene thin-film transistors

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; DANGLING BONDS; ELECTRON GUNS; HAFNIUM COMPOUNDS; LEAKAGE CURRENTS; SUPERCRITICAL FLUIDS;

EID: 43949134206     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2908191     Document Type: Article
Times cited : (11)

References (15)
  • 14
    • 84961742972 scopus 로고    scopus 로고
    • Proceedings of the IEEE 2002 International Interconnect Technology Conference, IEEE,.
    • S. Ogawa, T. Nasuno, M. Egami, and A. Nakashima, Proceedings of the IEEE 2002 International Interconnect Technology Conference, IEEE, p. 220 (2002).
    • (2002) , pp. 220
    • Ogawa, S.1    Nasuno, T.2    Egami, M.3    Nakashima, A.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.