Effects of supercritical fluids activation on carbon nanotube field emitters

IEEE Transactions on Nanotechnology

Volumn 6, Issue 1, 2007, Pages 29-34

  Liu, Po Tsun ^a,b   Tsai, Chih Tsung ^c   Chang, Ting ^d   Kin, Kon Tsu ^e   Chang, Pei Lin ^e   Chen, Chioumei ^e   Chen, Yi Ching ^e  

^a IEEE   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^d NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^e INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Carbon nanotubes (CNTs); Field emission; Supercritical carbon dioxide SCCO2 fluids

Indexed keywords

FIELD EMISSION; FLUIDS TREATMENT; SUPERCRITICAL CARBON DIOXIDE;

ACTIVATION ENERGY; CARBON DIOXIDE; CRYSTAL IMPURITIES; HEATING; MOISTURE; SUPERCRITICAL FLUIDS;

CARBON NANOTUBES;

EID: 33846607264     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2006.886785     Document Type: Article

References (20)

1. T. W. Ebbesen and P. M. Ajayan, "Large-scale synthesis of carbon nanotubes," Nature (Lond.), vol. 358, pp. 220-222, 1992.
2. S. T. Purcell, P. Vincent, C. Journet, and V. Thien Binh, "Stable heating of individual multiwall carbon nanotubes to 2000 K induced by the field-emission current," Phys. Rev. Lett., vol. 88, no. 105 502, 2002.
3. S. C. Kung, K. C. Hwang, and I. Nan Lin, "Oxygen and ozone oxidation-enhanced field emission of carbon nanotubes," Appl. Phys. Lett., vol. 80, pp. 4819-4821, 2002.
4. W. I. Milne, K. B. K. Teo, G. A. J. Amaratunga, P. Legagneux, L. Gangloff, J. P. Schnell, V. Semet, V. T. Binh, and O. Greening, "Carbon nanotubes as field emission sources," J. Mater. Chem., vol. 14, pp. 933-943, 2004.
5. 2," Ind., Eng. Chem. Res., vol. 42, p. 1598, 2003.
6. 2 applications in microelectronics processing," Microelectron. Eng., vol. 65, pp. 145-152, 2003.
7. H. Namatsu, "Supercritical drying for water-rinsed resist systems," J. Vac. Sci. Technol. B., vol. 18, pp. 3308-3312, 2000.
8. D. J. Mount, L. B. Rothman, R. J. Robey, and M. K. Ali, "The technology behind cleaning with supercritical fluids," Solid State Technol., vol. 45, p. 103, 2002.
9. J. W. King and L. L. Williams, "Utilization of critical fluids in processing semiconductors and their related materials," Curr. Opin. Solid State Mater. Sci., vol. 7, pp. 413-424, 2003.
10. R. Reidy, Z. Zhang, R. A. Orozco-Teran, B. P. Gorman, and D. W. Mueller, A. McKerrow, J. Leu, O. Kraft, and T. Kikkawa, Eds., "Effect of supercritical CO drying and photoresist strip on low-k films," in MRS Proc., Materials, Technology, Reliability for Advanced Interconnects Low-k Dielectrics, 2003, vol. 766, pp. 303-308.
11. P. T. Liu, C. T. Tsai, T. C. Chang, K. T. Kin, P. L. Chang, C. M. Chen, and H. F. Cheng, "Activation of carbon nanotube emitters by using supercritical carbon dioxide fluids with propyl alcohol," Electrochem. Solid-State Lett., vol. 9, no. 4, pp. G124-G126, 2006.
12. W. B. Choi, D. S. Chung, J. H. Kang, H. Y. Kim, Y. W. Jin, I. T. Han, Y. H. Lee, J. E. Jung, N. S. Lee, G. S. Park, and J. M. Kim, "Fully sealed, high-brightness carbon-nanotube field-emission display," Appl. Phys. Lett., vol. 75, pp. 3129-3131, 1999.
13. J. L. Kwo, M. Yokoyama, W. C. Wang, F. Y. Chuang, and I. N. Lin, "Characteristics of flat panel display using carbon nanotubes as electron emitters," Diamond Re lot. Mater., vol. 9, pp. 1270-1274, 2000.
14. Y. Cheng and O. Zhou, "Electron field emission from carbon nanotubes," Comptes Rendus Physique, vol. 4, pp. 1021-1033, 2003.
15. E. Kondoh, M. R. Baklanov, H. Bender, and K. Maex, "Structural change in porous silica thin film after plasma treatment," Electrochem. Solid-State Lett., vol. 1, pp. 224-226, 1998.
16. 2. Fundamental studies for the extraction of actinides from contaminated surfaces," Chem. Commun. (Cambridge), vol. 1, p. 25, 2001.
17. S. Kim and K. P. Johnston, T. G. Squires and M. E. Paulaitis, Eds., "Supercritical fluids," in ACSSymp. Series, Washington, DC, 1987, vol. 329, p. 42, Amer. Chem. Soc.
18. M. L. Lee and K. E. Markides, Analytical Supercritical Fluid Chromatography and Extraction. Provo, UT: Chromatography Conferences, 1990.
19. S. T. Purcell, P. Vincent, C. Journet, and V. T. Binh, "Hot nanotubes: Stable heating of individual multiwall carbon nanotubes to 2000 K induced by the field-emission current," Phys. Rev. Lett., vol. 88, p. 105 502, 2002.
20. P. Vincent, S. T. Purcell, C. Journet, and V. T. Binh, "Modelization of resistive heating of carbon nanotubes during field emission," Phys. Rev. B, vol. 66, p. 075 406, 2002.