Properties of GaP(001) surfaces thermally annealed in dry N2 atmosphere

Journal of Applied Physics

Volumn 103, Issue 9, 2008, Pages

  Rokugawa, Hiroshi ^a   Adachi, Sadao ^a  

^a GUNMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; GALLIUM COMPOUNDS; NITROGEN COMPOUNDS; RAPID THERMAL ANNEALING; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS;

DRY NITROGEN ATMOSPHERE; EX SITU ATOMIC FORCE MICROSCOPY; SPECTROELLIPSOMETRY; THERMAL OXIDES;

SURFACE ANALYSIS;

EID: 43949086554     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2919572     Document Type: Article

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