Fabrication of dome-shaped diaphragm with circular clamped boundary on silicon substrate

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 505-510

  Han, Cheol Hyun ^a   Kim, Eun Sok ^a  

^a UNIVERSITY OF HAWAII   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CELLOPHANE; DIAPHRAGMS; ELECTRODES; ETCHING; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; RESIDUAL STRESSES; SILICON NITRIDE; SUBSTRATES; ZINC OXIDE;

DOME-SHAPED DIAPHRAGMS; SELF-LIMITING ETCHING;

ACOUSTIC TRANSDUCERS;

EID: 0032634386     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)