Piezoelectric microspeaker with compressive nitride diaphgram

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 260-263

  Yi, Seung Hwan ^a   Kim, Eun Sok ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; DIAPHRAGMS; HARMONIC DISTORTION; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUITS; NITRIDES; PIEZOELECTRIC DEVICES; RESIDUAL STRESSES; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE STRUCTURES; SILICON WAFERS; TENSILE STRESS;

ELECTROMECHANICAL TRANSDUCTION; NITRIDE FILMS; PIEZOELECTRIC MICROSPEAKER; SOUND PRESSURE LEVEL; SPEAKER DIAPHRAGM;

MICROELECTROMECHANICAL DEVICES;

EID: 0036118061     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. IC-processed piezoelectric microphone
2. Micromachined subminiature condenser microphones in silicon
3. Silicon microphones
4. Integrated microphone with CMOS circuits on a single chip
5. Piezoelectric microphone with on-chip CMOS circuits
6. Piezoelectric cantilever microphone and microspeaker
7. Two-step deposition process of piezoelectric ZnO film and its application for film acoustic resonators
8. Fabrication of dome-shaped diaphragm with circular clamped boundary on silicon substrate